Formation of carbon nitride - A novel hard coating

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 116, Issue 1-4, 1996, Pages 452-456

  Chubaci, J F D ^a   Ogata, K ^b   Fujimoto, F ^d   Watanabe, S ^a   Biersack, J P ^c  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b NISSIN ELECTRIC CO LTD   (Japan)

^c HAHN MEITNER INSTITUT   (Germany)

^d NONE

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FUSED SILICA; INORGANIC COATINGS; ION BOMBARDMENT; NITROGEN; PLASMAS; SILICON WAFERS; VAPOR DEPOSITION; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE; FLUX COMPOSITION; HARD COATINGS; ION BEAM ASSISTED DEPOSITION; KNOOP HARDNESS INDENTATION; NITROGEN ENERGY; OPTICAL BAND GAP;

NITRIDES;

EID: 0030219043     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(96)00087-0     Document Type: Article

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