Homogeneous decomposition of aryl- and alkylimido precursors for the chemical vapor deposition of tungsten nitride: A combined density functional theory and experimental study

Journal of the American Chemical Society

Volumn 128, Issue 42, 2006, Pages 13781-13788

  Won, Yong Sun ^a   Kim, Young Seok ^a   Anderson, Timothy J ^a   Reitfort, Laurel L ^b   Ghiviriga, Ion ^b   McElwee White, Lisa ^b  

^a University of Florida   (United States)

^b NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONITRILE; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PROBABILITY DENSITY FUNCTION; TUNGSTEN COMPOUNDS;

DENSITY FUNCTIONAL THEORY (DFT); NATURAL BONDING ORBITAL (NBO); TUNGSTEN CARBONITRIDE; TUNGSTEN NITRIDE;

ORGANIC COMPOUNDS;

IMIDE; NITROGEN; TUNGSTEN; TUNGSTEN NITRIDE; UNCLASSIFIED DRUG;

ARTICLE; CHEMICAL VAPOR DEPOSITION; COMPLEX FORMATION; DECOMPOSITION; DENSITY FUNCTIONAL THEORY; DISSOCIATION CONSTANT; FRAGMENTATION REACTION; GAS ANALYSIS; LIGAND BINDING; MASS SPECTROMETRY; MATHEMATICAL COMPUTING; METAL BINDING; MOLECULAR BIOLOGY; NATURAL BONDING ORBITAL ANALYSIS;

EID: 33750420949     PISSN: 00027863     EISSN: None     Source Type: Journal    
DOI: 10.1021/ja0621804     Document Type: Article

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