Infrared spectroscopy of bonded silicon wafers

Semiconductors

Volumn 40, Issue 11, 2006, Pages 1304-1313

  Milekhin, A G ^a   Himcinschi, C ^b   Friedrich, M ^c   Hiller, K ^c   Wiemer, M ^c   Gessner, T ^c   Schulze, S ^c   Zahn, D R T ^c  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

^b MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^c CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33750368929     PISSN: 10637826     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1063782606110108     Document Type: Article

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