Characterization of low-temperature wafer bonding by infrared spectroscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 3, 2000, Pages 1392-1396

  Milekhin, A ^a,b   Friedrich, M ^a   Hiller, K ^a   Wiemer, M ^a   Gessner, T ^a   Zahn, D R T ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; BINDING ENERGY; BOND STRENGTH (CHEMICAL); BONDING; COMPOSITION EFFECTS; HYDROGEN BONDS; INFRARED SPECTROSCOPY; LIGHT TRANSMISSION; OXYGEN; PLASMA APPLICATIONS; SURFACE TREATMENT;

MULTIPLE INTERNAL TRANSMISSION (MIT) INFRARED SPECTROSCOPY;

SILICON WAFERS;

EID: 0034187294     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591391     Document Type: Article

References (20)

1. Q.-Y. Tong and U. Gösele, Semiconductor Wafer Bonding: Science and Technology (The Electrochemical Society, New York, 1999).
2. M. K. Weldon et al., J. Vac. Sci. Technol. B 15, 1065 (1997).
3. Q.-Y. Tong and U. Gösele, Electrochem. Soc. Proc. 95-7, 78 (1995).
4. M. K. Weldon, V. E. Marsico, Y. J. Chabal, D. R. Hamann, S. B. Christman, and E. E. Chaban, Surf. Sci. 368, 163 (1996).
5. M. K. Weldon, Y. J. Chabal, S. B. Christman, E. E. Chaban, L. C. Feldman, and D. R. Hamann, J. Vac. Sci. Technol. B 14, 3095 (1996).
6. A. Milekhin, M. Friedrich, K. Hiller, M. Wiemer, T. Gessner, and D. R. T. Zahn, Semicond. Sci. Technol. 14, 70 (1999).
7. A. Milekhin, M. Friedrich, K. Hiller, M. Wiemer, T. Gessner, and D. R. T. Zahn, J. Vac. Sci. Technol. B 17, 1733 (1999).
8. C. Maleville, O. Rayssac, H. Moriceau, B. Biasse, L. Baroux, B. Asper, and M. Bruel, Electrochem. Soc. Proc. 97-36, 46 (1997).
9. W. P. Maszara, G. Goetz, A. Gaviglia, and J. B. McKitterick, J. Appl. Phys. 64, 4943 (1988).
10. R. K. Iler, The Chemistry of Silica (Wiley, New York, 1979), pp. 622-729.
11. Sadtler Handbook of Infrared Spectra, edited by W. W. Simons (Sadtler, Philadelphia, PA, 1978).
12. K. Krishnan, P. J. Stout, and M. Watanabe, in Practical Fourier Transform Infrared Spectroscopy edited by J. R. Ferraro and K. Krishnan (Academic, San Diego, 1990), pp. 285-349.
13. P. Dumas, Y. J. Chabal, and P. Jakob, Surf. Sci. 269/270, 867 (1992).
14. H. Ogawa and T. Hattori, Appl. Phys. Lett. 61, 577 (1992).
15. Z.-H. Zhou, E. S. Aydil, R. A. Gottscho, Y. J. Chabal, and R. Reif, J. Electrochem. Soc. 140, 3316 (1993).
16. M. Niwano, J. Kageyama, K. Kurita, K. Kinashi, I. Takahashi, and N. Miyamoto, J. Appl. Phys. 76, 2157 (1994).
17. Y. J. Chabal, Surf. Sci. Rep. 8, 211 (1988).
18. R. E. Pritchard, M. J. Ashwin, J. H. Tucker, R. C. Newman, E. C. Lightowlers, M. J. Binn, S. A. McQuaid, and R. Falster, Phys. Rev. B 56, 13 118 (1997).
19. D. Lin-Vien, N. B. Colthup, W. G. Fateley, and J. G. Grasselli, The Handbook of Infrared and Raman Characteristic Frequencies of Organic Molecules (Academic, Boston, 1991).
20. J. A. Schaefer, D. Frankel, F. Stucki, W. Gopel, and G. J. Lapeyre, Surf. Sci. 139, L209 (1984).