Fabrication of smart material PZT thin films by RF magnetron sputtering method in micro actuators

JSME International Journal, Series A: Solid Mechanics and Material Engineering

Volumn 49, Issue 2, 2006, Pages 201-208

  Tsuchiya, Kazuyoshi ^a   Kitagawa, Toshiaki ^b,c   Uetsuji, Yasutomo ^b   Nakamachi, Eiji ^b  

^a TOKAI UNIVERSITY   (Japan)

^b OSAKA INSTITUTE OF TECHNOLOGY   (Japan)

^c SHARP CORPORATION   (Japan)

Author keywords

Ceramics; Experimental design method; Material design; Micromechanics; Optimum design; Piezoelectric actuator; PZT; RF magnetron sputtering

Indexed keywords

EXPERIMENTAL DESIGN METHOD; MATERIAL DESIGN; OPTIMUM DESIGN; PIEZOELECTRIC THIN FILMS;

ATOMIC FORCE MICROSCOPY; CRYSTALS; ELASTIC MODULI; PEROVSKITE; PIEZOELECTRIC MATERIALS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

CERAMIC MATERIALS;

ATOMIC FORCE MICROSCOPY; CERAMIC MATERIALS; CRYSTALS; ELASTIC MODULI; PEROVSKITE; PIEZOELECTRIC MATERIALS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

EID: 33750313587     PISSN: 13447912     EISSN: 13475363     Source Type: Journal    
DOI: 10.1299/jsmea.49.201     Document Type: Article

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