Analysis of sputter process on a new ZrTi+PbO target system and its application to low-temperature deposition of ferroelectric Pb(Zr,Ti)O3 films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 3, 1996, Pages 1868-1872

  Zhang, WeiXiao ^a   Sasaki, Kimihiro ^a   Hata, Tomonobu ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

Ferroelectric; Metallic mode; Near metallic mode; Near stoichiometric; Oxide mode; Perovskite; PZT+PbO target; ZrTi+PbO target

Indexed keywords

CHARACTERIZATION; COMPOSITION; CRYSTALLINE MATERIALS; FERROELECTRIC MATERIALS; PEROVSKITE; PHASE TRANSITIONS; SUBSTRATES; TARGETS; THERMAL EFFECTS; THIN FILMS; ZIRCONIUM ALLOYS;

LEAD OXIDE PELLETS; LEAD ZIRCONATE TITANATE; NEAR METALLIC DEPOSITION MODE; NEAR STOICHIOMETRIC PEROVSKITE; OXIDE MODE; ZIRCONIUM TITANIUM ALLOY;

SPUTTER DEPOSITION;

EID: 0030100598     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.1868     Document Type: Article

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