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Volumn 40, Issue 9 B, 2001, Pages 5761-5765
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Rotary multilayer split morph - A piezoelectric microactuator for dual-stage actuation systems in high track density hard disk drives
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Author keywords
Dual stage actuation system; Hard disk drive; Multilayer; Piezoelectric actuator; Split morph
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Indexed keywords
FINITE ELEMENT METHOD;
HARD DISK STORAGE;
MULTILAYERS;
NATURAL FREQUENCIES;
OPTIMIZATION;
PIEZOELECTRIC DEVICES;
DUAL-STAGE ACTUATION SYSTEMS;
MICROACTUATORS;
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EID: 0035455307
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.40.5761 Document Type: Article |
Times cited : (3)
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References (10)
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