Development of deposition technique for PZT thin film actuator in MEMS

Nippon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A

Volumn 69, Issue 11, 2003, Pages 1601-1605

  Tsuchiya, Kazuyoshi ^a   Kitagawa, Toshiaki ^b   Okuda, Yuji ^b   Nakamachi, Eiji ^b  

^a OSAKA INSTITUTE OF TECHNOLOGY   (Japan)

^b NONE

Author keywords

Ceramic target; Material testing; Metallic target; Micromechanics; Neutralized oxygen particles; Optimum design; Piezoelectric actuator; PZT; RF magnetron sputtering

Indexed keywords

COMPOSITE MICROMECHANICS; COMPOSITION; CRYSTAL STRUCTURE; DEPOSITION; HIGH TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; MATERIALS TESTING; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC MATERIALS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

DEPOSITION RATE; GAS FLOW RATE; INVAR ALLOY; PEROVSKITE STRUCTURE;

LEAD COMPOUNDS;

EID: 0742319332     PISSN: 03875008     EISSN: None     Source Type: Journal    
DOI: 10.1299/kikaia.69.1601     Document Type: Article

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