Manufacturable MEMS microcolumn

Microelectronic Engineering

Volumn 78-79, Issue 1-4, 2005, Pages 62-72

  Saini, R ^a   Jandric, Z ^a   Tsui, K ^a   Udeshi, T ^a   Tuggle, D ^b  

^a ZYVEX CORPORATION   (United States)

^b PORTLAND STATE UNIVERSITY   (United States)

Author keywords

Assembly; Automated assembly; Manufacturability; MEMS; MEMS assembly; Microcolumn; Nanoeffector; Self aligning assembly

Indexed keywords

ELECTRIC BREAKDOWN; ELECTRIC CONNECTORS; ELECTRON BEAMS; ELECTROSTATICS; FABRICATION; NANOTECHNOLOGY; NATURAL FREQUENCIES; SELF ASSEMBLY; SILICA;

AUTOMATED ASSEMBLY; MANUFACTURABILITY; MEMS; MEMS ASSEMBLY; MICROCOLUMNS; NANOEFFECTOR; SELF-ALIGNING ASSEMBLY;

MICROELECTROMECHANICAL DEVICES;

EID: 14944350448     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2004.12.010     Document Type: Conference Paper

References (22)

1. T.H.P Chang et al., US Patent 5,122,663, June 16, 1992
2. T.H.P.Chang et al., US Patent 6,023,060, February 8, 2000
3. T.H.P. Chang Journal of Vacuum Science and Technology B 8 6 1990 1698
4. L.P. Muray Journal of Vacuum Science and Technology B 18 6 2000 3099
5. E. Kratschmer Journal of Vacuum Science and Technology B 13 1995 2498
6. J.M. Krans et al., US Patent 6,218,664, April 17, 2001
7. J.M. Krans, and T.L. van Rooy Proceedings of Microscopy and Microanalysis 1999 322
8. J.Y. Park Journal of Vacuum Science and Technology B 16 2 1998 826
9. G.M. Shedd, H. Schmid, and H.W. Fink Ultramicroscopy 48 1993 43
10. R.Y. Lutsch, and E. Plies Ultramicroscopy 93 2002 339
11. D. Winkler Journal of Vacuum Science and Technology B 16 1998 3181
12. T. Ambe Microelectronic Engineering 61-62 2002 317
13. D.A. Crewe Journal of Vacuum Science and Technology B 14 1996 3808
14. A. Zlatkin, and N. Garcia Microelectronic Engineering 31 1996 95
15. F. Burstert, D. Winkler, and B. Lischke Microelectronic Engineering 31 1996 95
16. R. Saini et al., Presented at EIPBN 2004
17. K. Tsui et al., Proceedings of InterPACK03 International Electronic Packaging Conference, 2003
18. K. Tsui Journal of Micromechanics and Microengineering 14 4 2004 542
19. M. Szilagyi, and H. Cho Journal of Vacuum Science and Technology B 15 6 1997 1971
20. M.G.R. Thomson Journal of Vacuum Science and Technology B 14 6 1996 3802
21. J.E. Barth, and P. Kruit Optik 101 3 1996 101 109
22. Z. Jandric et al., The IMAPS New England 31st Annual Symposium, 2004