Characterization of two by two electron-beam microcolumn array aligned with field emission array

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 2, 1998, Pages 826-828

  Park, Jeong Young ^a   Lera, Jared D ^a   Choi, H J ^a   Buh, G H ^a   Kang, C J ^a   Jung, J H ^a   Choi, S S ^a,b   Jeon, D ^a,c   Kuk, Young ^a  

^a Seoul National University   (South Korea)

^b SunMoon University   (South Korea)

^c Myong Ji University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011653815     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589915     Document Type: Article

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