Synthesis of electrostatic focusing and deflection systems

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 1971-1982

  Szilagyi, M ^a   Cho, H ^a  

^a University of Arizona   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4143083955     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589587     Document Type: Article

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