Validation of absolute planarity reference plates with a liquid mirror

Metrologia

Volumn 42, Issue 5, 2005, Pages 389-393

  Vannoni, Maurizio ^a   Molesini, Giuseppe ^a  

^a ISTITUTO NAZIONALE DI OTTICA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

MIRRORS;

LIQUID MIRRORS; PLANARITY; UNCERTAINTY;

MEASUREMENT THEORY;

EID: 26444450981     PISSN: 00261394     EISSN: None     Source Type: Journal    
DOI: 10.1088/0026-1394/42/5/008     Document Type: Article

References (35)

1. Briers J D 1999 Interferometric optical testing: an inter-laboratory comparison J. Opt. A: Pure Appl. Opt. 1 1-14
2. Lord Rayleigh 1893 Interference bands and their applications Nature 48 212-4
3. Schulz G and Schwider J 1967 Precise measurement of planeness Appl. Opt. 6 1077-84
4. Parks R E 1978 Removal of test optics errors Proc. SPIE 153 56-63
5. Fritz B S 1984 Absolute calibration of an optical flat Opt. Eng. 23 379-83
6. Grzanna J and Schulz G 1990 Absolute testing of flatness standards at square-grid points Opt. Commun. 77 107-12
7. Schulz G 1993 Absolute flatness testing by an extended rotation method using two angles of rotation Appl. Opt. 32 1055-9
8. Ai C and Wyant J C 1993 Absolute testing of flats by using even and odd functions Appl. Opt. 32 4698-705
9. Elssner K-E, Vogel A, Grzanna J and Schulz G 1994 Establishing a flatness standard Appl. Opt. 33 2437-46
10. Evans C J and Kestner R N 1996 Test optics error removal Appl. Opt. 35 1015-21
11. Chen J, Song D, Zhu R, Wang Q and Chen L 1996 Large-aperture high-accuracy phase-shifting digital flat interferometer Opt. Eng. 35 1936-42
12. Hariharan P 1997 Interferometric testing of optical surfaces: absolute measurement of flatness Opt. Eng. 36 2478-81
13. Evans C J 1998 Comment on the paper 'Interferometric testing of optical surfaces: absolute measurement of flatness' Opt. Eng. 37 1880-2
14. Parks R E, Evans C J, Sullivan P O, Shao L-Z and Loucks B 1997 Measurement of the LIGO pathfinder optics Proc. SPIE 3134 95-111
15. Parks R E, Shao L-Z and Evans J C 1998 Pixel-based absolute topography test for three flats Appl. Opt. 37 5951-6
16. Greco V, Tronconi R, Del Vecchio C, Trivi M and Molesini G 1999 Absolute measurement of planarity with Fritz's method: uncertainty evaluation Appl. Opt. 38 2018-27
17. Oreb B F, Farrant D I, Walsh C J, Forbes G and Fairman P S 2000 Calibration of a 300-mm-aperture phase-shifting Fizeau interferometer Appl. Opt. 39 5161-71
18. Freischlad K 2001 Absolute interferometric testing based on reconstruction of rotational shear Appl. Opt. 40 1637-48
19. Dew G D 1966 The measurement of optical flatness J. Sci. Instrum. 43 409-15
20. Brünnagel R, Oehring H-A and Steiner K 1967 Fizeau interferometer for measuring the flatness of optical surfaces Appl. Opt. 7 331-5
21. Ketelsen D A and Anderson D S 1988 Optical testing with large liquid flats Proc. SPIE 966 365-71
22. Powell I and Goulet E 1998 Absolute figure measurements with a liquid-flat reference Appl. Opt. 37 2579-88
23. Weingärtner I and Schulz M 1999 Novel scanning technique for ultra-precise measurement of slope and topography of flats, aspheres and complex surfaces Proc. SPIE 3739 274-82
24. Schulz M, Geckeler R D and Illemann J 2003 High-accuracy form measurement of large optical surfaces Proc. SPIE 5190 211-20
25. GPI-XP, Zygo Corporation, Middlefield, Connecticut
26. Landau L and Lifchitz E 1967 Théorie de l'Élasticité (Moscow: MIR) p 67
27. Timoshenko S P and Woinowsky-Krieger S 1959 Theory of Plates and Shells 2nd edn (Singapore: McGraw-Hill) pp 57, 74
28. Emerson W B 1952 Determination of planeness and bending of optical flats J. Res. NBS 49 241-7
29. Selke L A 1970 Theoretical elastic deflections of a thick horizontal circular mirror on a ring support Appl. Opt. 9 149-53
30. Love A E H 1944 Treatise on the Mathematical Theory of Elasticity (New York: Dover) p 481
31. Born M and Wolf E 1975 Principles of Optics 5th edn (Oxford: Pergamon) pp 464-6
32. Malacara D and De Vore S L 1992 Interferogram evaluation and wavefront fitting Optical Shop Testing 2nd edn ed D Malacara (New York: Wiley) pp 455-99
33. Greco V, Molesini G, Quercioli F and Novi A 1991 Interferometric testing of weak aspheric surfaces versus design specifications Optik 87 159-62
34. BIPM IEC IFCC ISO IUPAC IUPAP OIML 1993 Guide to the Expression of Uncertainty in Measurements (Geneva: ISO)
35. European Co-operation for Accreditation 1996 EA Interlaboratory Comparison Publication EA 2/03 (rev. 01) appendix H p 27