Micro actuators and their applications

Microelectronics Journal

Volumn 29, Issue 9, 1998, Pages 637-640

  Fujita, Hiroyuki ^a   Toshiyoshi, Hiroshi ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Autonomous distributed systems; Micromachines; Microwave; Optical switch; Shape memory alloy; Three dimensional microstructures

Indexed keywords

CRYSTAL MICROSTRUCTURE; MICROWAVES; MIRRORS; OPTICAL SWITCHES; SHAPE MEMORY EFFECT; THIN FILMS; THREE DIMENSIONAL; TITANIUM ALLOYS;

ARRAYED TORSIONAL MICROMIRROR; AUTONOMOUS DISTRIBUTED SYSTEMS; ELECTROSTATIC FORCE; MICROMACHINES;

MICROACTUATORS;

EID: 0032163506     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0026-2692(98)00027-5     Document Type: Article

References (10)

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