Design, fabrication and characterization of an electromagnetically actuated addressable out-of-plane micromirror array for vertical optical source applications

Journal of Micromechanics and Microengineering

Volumn 13, Issue 6, 2003, Pages 853-863

  Jang, Yun Ho ^a   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CLAMPING DEVICES; ELASTICITY; HOLOGRAMS; MAGNETIC FIELD EFFECTS; MIRRORS; STRESS ANALYSIS;

ANGULAR ROTATION;

ACTUATORS;

EID: 0242552228     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/6/308     Document Type: Article

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