Evaluation of self-organized diffusion barrier continuity on a nano-architectural silica thin film with two-dimensionally connected cage-like pores using positronium time of flight spectroscopy

Microporous and Mesoporous Materials

Volumn 95, Issue 1-3, 2006, Pages 164-171

  Tanaka, H K M ^a,b   Kurihara, T ^b   Nishiyama, N ^c   Maruo, T ^c   Mills Jr , A P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b INSTITUTE OF MATERIALS STRUCTURE SCIENCE   (Japan)

^c OSAKA UNIVERSITY   (Japan)

Author keywords

Low k interlayer dielectrics; Mesoporous silica; Positronium; Self organization; Time of flight spectroscopy

Indexed keywords

DIELECTRIC MATERIALS; DIFFUSION; MESOPOROUS MATERIALS; POSITRONS; SILICA; THIN FILMS;

POSITRONIUM; SELF ORGANIZATION; TIME OF FLIGHT SPECTROSCOPY;

NANOSTRUCTURED MATERIALS;

DIELECTRIC MATERIALS; DIFFUSION; MESOPOROUS MATERIALS; NANOSTRUCTURED MATERIALS; POSITRONS; SILICA; THIN FILMS;

EID: 33748695288     PISSN: 13871811     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micromeso.2006.05.011     Document Type: Article

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