Characterization of metal-induced lateral crystallization of amorphous SiGe on insulating film

Thin Solid Films

Volumn 508, Issue 1-2, 2006, Pages 57-60

  Itakura, Masaru ^a   Masumori, Syunji ^a   Ohta, Tomohisa ^a   Tomokiyo, Yoshitsugu ^a   Kuwano, Noriyuki ^a   Kanno, Hiroshi ^a   Sadoh, Taizoh ^a   Miyao, Masanobu ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

Metal induced lateral crystallization (MILC); Scanning electron microscopy (SEM); SiGe thin film; Transmission electron microscopy (TEM)

Indexed keywords

ANNEALING; ATOMS; CRYSTALLIZATION; INSULATING MATERIALS; NICKEL COMPOUNDS; SCANNING ELECTRON MICROSCOPY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

METAL-INDUCED LATERAL CRYSTALLIZATION (MILC); NISI2; SIGE THIN FILMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 33748641543     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.06.102     Document Type: Article

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