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Volumn 24, Issue 5, 2006, Pages 1955-1969
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Scaling of hollow cathode magnetrons for ionized metal physical vapor deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
DEPOSITION PROCESS;
DIFFUSION BARRIERS;
HOLLOW CATHODE MAGNETRONS (HCM);
HYBRID MODELS;
ALGORITHMS;
CATHODES;
IONIZATION;
MAGNETIC FIELDS;
MICROELECTRONICS;
OPTIMIZATION;
PHYSICAL VAPOR DEPOSITION;
PRESSURE EFFECTS;
MAGNETRONS;
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EID: 33748524584
PISSN: 07342101
EISSN: None
Source Type: Journal
DOI: 10.1116/1.2335864 Document Type: Article |
Times cited : (21)
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References (18)
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