메뉴 건너뛰기




Volumn 24, Issue 5, 2006, Pages 1955-1969

Scaling of hollow cathode magnetrons for ionized metal physical vapor deposition

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION PROCESS; DIFFUSION BARRIERS; HOLLOW CATHODE MAGNETRONS (HCM); HYBRID MODELS;

EID: 33748524584     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2335864     Document Type: Article
Times cited : (21)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.