Mechanical characterization of released thin films by contact loading

Journal of Applied Mechanics, Transactions ASME

Volumn 73, Issue 5, 2006, Pages 730-736

  Zhang, Rongjing ^a   Shilo, Doron ^b   Ravichandran, Guruswami ^a   Bhattacharya, Kaushik ^a  

^a California Institute of Technology   (United States)

^b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE MATERIALS; FUNCTIONAL THIN FILM MATERIALS; MECHANICAL CHARACTERIZATION; MECHANICAL RESPONSE;

ACTUATORS; ELASTIC MODULI; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; SHAPE MEMORY EFFECT; STRUCTURAL LOADS;

THIN FILMS;

EID: 33748433678     PISSN: 00218936     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2166652     Document Type: Conference Paper

References (26)

1. Spearing, S. M., 2000, "Materials Issues in Microelectromechanical Systems (MEMS)," Acta Mater., 48, pp. 179-196.
2. Sharpe, W. N., 2001, Mechanical Properties of MEMS Materials, in The MEMS Handbook, M. Gad-el-Hak, ed., CRC Press, Boca Raton, FL.
3. Senturia, S. D., 2001, Microsystem design, Kluwer Publishers, Boston.
4. Oliver, W. C., and Pharr, G. M., 1992, "An Improved Technique for Determining Hardness and Elastic Modulus Using Load and Displacement Sensing Indentation Experiments," J. Mater. Res., 7(6), pp. 1564-1583.
5. Srikar, V. T., and Spearing, S. M., 2003, "A Critical Review of Microscale Mechanical Testing Methods Used in the Design of Microelectromechanical Systems," Exp. Mech., 43, pp. 238-247.
6. Haque, M. A., and Saif, M. T. A., 2003, "A Review of MEMS-Based Microscale and Nanoscale Tensile and Bending Testing," Exp. Mech., 43(3), pp. 248-255.
7. Kraft, O., and Volkert, C. A., 2001, "Mechanical Testing of Thin Films and Small Structures," Adv. Eng. Mater., 3, pp. 99-110.
8. Zhang, T. Y., Su, Y. J., Qian, C. F., Zhao, M. H., and Chen, L. Q., 2000, "Microbridge Testing of Silicon Nitride Thin Films Deposited on Silicon Wafer," Acta Mater., 48, pp. 2843-2857.
9. Vlassak, J. J., and Nix, W. D., 1992, "A New Bulge Test Technique for the Determination of Young's Modulus and Poisson's Ratio of Thin Films," J. Mater. Res., 7(12), pp. 3242-3249.
10. Read, D. T., and Dally, J. W., 1993, "A New Method for Measuring the Strength and Ductility of Thin Films," J. Mater. Res., 8(7), pp. 1542-1549.
11. Chasiotis, I., and Knauss, W., 2002, "A New Microtensile Tester for the Study of MEMS Materials with the Aid of Atomic Force Microscopy," Exp. Mech., 42(1), pp. 51-57.
12. Haque, M. A., and Saif, M. T. A., 2002, "In situ Tensile Testing of Nano-scale Specimens in SEM and TEM," Exp. Mech., 42, pp. 123-128.
13. Emery, R. D., and Povirk, G. L., 2003, "Tensile Behavior of Free-standing Gold Films. Part I. Coarse-Grained Films," Acta Mater., 51, pp. 2067-2078;
14. Acta Mater., 51, pp. 2079-2087.
15. Espinosa, H. D., Prorok, B. C., and Fischer, M., 2003, "A Methodology for Determining Mechanical Properties of Freestanding Thin Films and MEMS Materials," J. Mech. Phys. Solids, 51, pp. 47-67.
16. Sharpe, W. N., and Gianola, D. S., 2004, "Techniques for Testing Thin Films in Tension," Exp. Tech., 28, pp. 23-27.
17. Ruud, J. A., Josell, D., Spaepen, F., and Greer, A. L., 1993, "A New Method for Tensile Testing of Thin Films," J. Mater. Res., 8(1), pp. 112-117.
18. Zhu, Y., Moldova, N., and Espinosa, H. D., 2005, "A Microelectromechanical Load Sensor for In Situ Electron and X-ray Microscopy Tensile Testing on Nanostructures," Appl. Phys. Lett., 86, 013506.
19. Shu, Y. C., and Bhattacharya, K., "Domain Patterns and Macroscopic Behavior of Ferroelectric Materials," Philos. Mag. B, 81(12), (2001).
20. Burcsu, E., Ravichandran, G., and Bhattacharya, K., "Large Electrostrictive Actuation of Barium Titanate Single Crystals," J. Mech. Phys. Solids, 52, 823-846 (2004).
21. Katsikadelis, J. T., Nerantzaki, M. S., and Tsiatas, C. C., 2001, "The Analog Equation Method for Large Deflection Analysis of Membranes. A Boundary-only Solution," Comput. Mech., 27, pp. 513-523.
22. Begley, M. R., and Mackin, T. J., 2004, "Spherical Indentation of Freestanding Circular Thin Films in the Membrane Regime," J. Mech. Phys. Solids. 52, pp 2005-2023.
23. ABAQUS, www.abaqus.com
24. Edwards, R. L., and Sharpe, W. N., 2004, "Comparison of Tensile and Bulge Tests for Thin-film Silicon Nitride," Exp. Mech., 44, pp. 49-54.
25. Zhang, Y., and Wise, K. D., 1994, "Performance of Non-Planar Silicon Diaphragms Under Large Deflections," J. Microelectromech. Syst., 3(2), pp. 59-68.
26. Zhang, R., Shilo, D., De Basombes, J. T., Bhattcharya, K., and Ravichandran, G., 2005, "Mechanical Characterization of Multi-Layer Free Standing Thin Films Using Pressure Bulge Test," Exp. Mech., in preparation.