Study of damage in ion-irradiated α-SiC by optical spectroscopy

Journal of Physics Condensed Matter

Volumn 18, Issue 37, 2006, Pages 8493-8502

  Sorieul, S ^a   Costantini, J M ^a   Gosmain, L ^b   Calas, G ^c   Grob, J J ^d   Thome L ^e  

^a SRMA   (France)

^b CEA SACLAY   (France)

^c INSTITUT DE PHYSIQUE DU GLOBE DE PARIS   (France)

^d Faculté de Médecine   (France)

^e CENTRE DE CALCUL DE L INSTITUT NATIONAL DE PHYSIQUE NUCLEAIRE ET DE PHYSIQUE DES PARTICULES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; GOLD; IONS; LIGHT ABSORPTION; RAMAN SCATTERING; SINGLE CRYSTALS; SPECTROSCOPIC ANALYSIS; XENON;

DYNAMIC ANNEALING; ION IRRADIATION; OPTICAL SPECTROSCOPY; URBACH ENERGY;

SILICON CARBIDE;

EID: 33748363893     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/18/37/008     Document Type: Article

References (47)

1. Weber W J, Wang L M, Yu N and Hess N J 1998 Mater. Sci. Eng. A 253 62
2. Wendler E, Heft A and Wesch W 1998 Nucl. Instrum. Methods Phys. Res. B 141 105
3. Heera V, Prokert F, Schell N, Seifarth H, Fukarek W, Voelskow M and Skorupa W 1997 Appl. Phys. Lett. 70 3531
4. Jiang W, Weber W J, Thevuthasan S and McCready D E 1999 Surf. Interface Anal. 27 179
5. Ohno T, Onose H, Sugawara Y, Asano K, Hayashi T and Yatsuo T 1999 J. Electron. Mater. 28 180
6. Jiang W, Weber W J, Zhang Y, Thevuthasan S and Sutthanandan V 2003 Nucl. Instrum. Methods Phys. Res. B 207 92
7. Bolse W, Conrad J, Rödle T and Weber T 1995 Surf. Coat. Technol. 74/75 927
8. Musumeci P, Calcagno L, Grimaldi M G and Foti G 1996 Appl. Phys. Lett. 69 468
9. Bolse W, Conrad J, Harbsmeier F, Borowski M and Rödle T 1997 Mater. Sci. Forum 248/249 319
10. Musumeci P, Reitano R, Calcagno L, Roccaforte F, Makhtari A and Grimaldi M G 1997 Phil. Mag. B 76 323
11. Bolse W 1998 Nucl. Instrum. Methods Phys. Res. B 141 133
12. Wendler E and Peiter G 2000 J. Appl. Phys. 87 7679
13. Calcagno L, Grimaldi M G and Musumeci P 1997 J. Mater. Res. 12 1727
14. Derst G, Wilbertz C, Bhatia K L, Krätschmer W and Kalbitzer S 1989 Appl. Phys. Lett. 54 1722
15. Musumeci P, Calcagno L, Grimaldi M G and Foti G 1996 Nucl. Instrum. Methods Phys. Res. B 116 327
16. Musumeci P, Reitano R, Calcagno L, Roccaforte F, Makhtari A and Grimaldi M G 1997 Phil. Mag. B 76 323
17. Wendler E, Heft A, Wesch W, Peiter G and Dunken H H 1997 Nucl. Instrum. Methods Phys. Res. B 127/128 341
18. Wendler E and Peiter G 2000 J. Appl. Phys. 87 7679
19. Sorieul S, Costantini J-M, Gosmain L, Thomé L and Grob J-J 2006 J. Phys.: Condens. Matter 18 5235
20. Menzel R, Gärtner K, Wesch W and Hobert H 2000 J. Appl. Phys. 88 5658
21. Yuan X and Hobbs L W 2002 Nucl. Instrum. Methods Phys. Res. B 191 74
22. Zhang Y, Weber W J, Jiang W, Wang C M and Shutthanandan V 2004 J. Appl. Phys. 95 4012
23. Ziegler F, Biersack J P and Littmarck U 1985 The Stopping and Range of Ions in Solids (New York: Pergamon)
24. Devanathan R and Weber W J 2000 J. Nucl. Mater. 278 258
25. Lucas G and Pizzagalli L 2005 Nucl. Instrum. Methods Phys. Res. B 229 359
26. Wendler E, Heft A, Zammit U, Glaser E, Marinelli M and Wesch W 1996 Nucl. Instrum. Methods Phys. Res. B 116 398
27. Compagnini G, Foti G, Reitano R and Mondio G 1993 J. Non-Cryst. Solids 162 237
28. Pankove J I 1971 Optical Processes in Semiconductors (Englewood Cliffs, NJ: Prentice-Hall)
29. Musumeci P, Calcagno L, Grimaldi M G and Foti G 1996 Appl. Phys. Lett. 69 468
30. Levalois M, Lhermitte-Sebire I, Marie P, Paumier E and Vicens J 1996 Nucl. Instrum. Methods Phys. Res. B 107 239
31. Mott N F and Davis E A 1979 Electronic Processes in Non-Crystalline Materials 2nd edn (Oxford: Clarendon)
32. Tauc J 1974 Amorphous and Liquid Semiconductors ed J Tauc (London: Plenum) pp170-95
33. Yasuda K, Takeda M, Masuda H and Yoshida A 1982 Phys. Status Solidi a 71 549
34. Zammit U, Gasparrini F, Marinelli M, Pizzoferrato R, Agostini A and Mercuri F 1991 J. Appl. Phys. 70 7060
35. Tripura Sundari S 2004 Nucl. Instrum. Methods Phys. Res. B 215 157
36. Rincon C, Wasim S M, Marin G, Marquez R, Nieves L, Sanchez Perez G and Medina E 2001 J. Appl. Phys. 90 4423
37. Rusli K, Yoon S F, Ahn J, Ligatchev V, Teo E J, Osipowicz T and Watt F 2002 J. Appl. Phys. 92 2937
38. Jiang W, Weber W J, Zhang Y, Thevuthasan S and Sutthanandan V 2003 Nucl. Instrum. Methods Phys. Res. B 207 92
39. Jiang W, Zhang Y and Weber W J 2004 Phys. Rev. B 70 165208
40. Ohno T, Onose H, Sugawara Y, Asano K, Hayashi T and Yatsuo T 1999 J. Electron. Mater. 28 180
41. Ishimaru M, Dickerson R M and Sickafus K E 1999 Appl. Phys. Lett. 75 352
42. Itoh H, Uedono A, Ohshima T, Aoki Y, Yoshikawa M, Nashiyama I, Tanigawa S, Okumura H and Sadafumi Y 1997 Appl. Phys. A 65 315
43. Slotte J, Saarinen K, Janson M S, Hallén A, Kuznetsov A Yu, Svensson B G, Wong-Leung J and Jagadish C 2005 J. Appl. Phys. 97 033513
44. Campos F J, Mestres N, Morvan E, Godignon P and Millan J 1999 J. Appl. Phys. 85 99
45. Héliou R, Brebner J L and Roorda S 2001 Nucl. Instrum. Methods Phys. Res. B 175-177 268
46. Jiang W and Weber W J 2001 Phys. Rev. B 64 125206
47. Weber W J, Jiang W and Thevuthasan S 2001 Nucl. Instrum. Methods Phys. Res. B 175-177 26