Confocal micro-Raman characterization of lattice damage in high energy aluminum implanted 6H-SiC

Journal of Applied Physics

Volumn 85, Issue 1, 1999, Pages 99-104

  Campos, F J ^a   Mestres, N ^b   Pascual, J ^a   Morvan, E ^c   Godignon, P ^c   Millan J ^c  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b INSTITUT DE CIÈNCIA DE MATERIALS DE BARCELONA ICMAB CSIC   (Spain)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003994699     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369427     Document Type: Article

References (20)

1. M. A. Campano and R. J. Tew, MRS Bull. 22, 19 (1997).
2. L. J. Kroko and A. G. Milnes, Solid-State Electron. 9, 1125 (1966).
3. H. G. Bohn, J. M. Williams, C. J. McHargue, and G. M. Begun, J. Mater. Res. 2, 107 (1987).
4. C. J. McHargue and J. M. Williams, Nucl. Instrum. Methods Phys. Res. B 80/81, 889 (1993).
5. M. Ikeda, H. Matsunami, and T. Tanaka, Phys. Rev. B 22, 2842 (1980).
6. D. Planson, M. L. Locatelli, S. Ortolland, J. P. Chante, H. Mitlehner, and D. Stephani, Mater. Sci. Eng., B 46, 210 (1997).
7. T. Wilson and C. Sheppard, Theory and Practice of Scanning Optical Microscopy (Academic, London, 1984).
8. T. Wilson "Confocal microscopy," in Confocal Microscopy, edited by T. Wilson (Academic, London, 1990), p. 41.
9. M. V. Rao, P. Griffiths, J. Gardner, O. W. Holland, M. Ghezzo, J. Kretchmer, G. Kelner, and J. A. Freitas, Jr., J. Electron. Mater. 25, 75 (1996).
10. G. Lulli, Instituto LAMEL, CNR, 40129 Bologna, Italy (implantation provider).
11. D. F. Edwards, in Handbook of Optical Constants in Solids, edited by E. D. Palik (Academic, London 1985), p. 547.
12. R. Tabaksblat, R. J. Meier, and B. J. Kip, Appl. Spectrosc. 46, 60 (1992).
13. S. Hajatdoost and J. Yarwood, Appl. Spectrosc. 50, 558 (1996).
14. W. J. Choyke and E. D. Palik, in Handbook of Optical Constants in Solids, edited by E. D. Palik (Academic, London, 1985), p. 587.
15. N. Mestres, M. Ben El Mekki, F. J. Campos, J. Pascual, E. Morvan, P. Godignon, J. Millán, and G. Lulli, Mater. Sci. Forum 264-268, 733 (1998).
16. T. Kimoto, A. Itoh, H. Matsunami, T. Nakata, and M. Watanabe, J. Electron. Mater. 24, 235 (1995).
17. A. Pérez-Rodríguez, Y. Pacaud, L. Calvo-Barrio, C. Serre, W. Skorupa, and J. R. Morante, J. Electron. Mater. 25, 541 (1996).
18. S. Hell, G. Reiner, C. Cremmer, and E. H. K. Stelzer, J. Microsc. 169, 391 (1993).
19. E. Morvan, P. Godignon, J. Montserrat, J. Fernández, D. Flores, and J. Millán, Mater. Sci. Eng., B 46, 218 (1997).
20. E. A. Fagen, in Silicon Carbide 1973, edited by R. C. Marshall, J. W. Faust, Jr., and C. E. Ryan (University of South Carolina Press, Columbia, SC, 1974), p. 542.