Initial stage of nitridation on Si(1 0 0) surface using low-energy nitrogen ion implantation

Surface Science

Volumn 600, Issue 17, 2006, Pages 3496-3501

  Kim, Ki jeong ^a,c   Kang, Tai Hee ^a   Ihm, Kyuwook ^a   Jeon, Chulho ^b   Hwang, Chan Cuk ^a   Kim, Bongsoo ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b Sungkyunkwan University   (South Korea)

^c Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Ion implantation; Silicon nitride; Synchrotron radiation photoemission spectroscopy

Indexed keywords

ANNEALING; ION IMPLANTATION; PHOTOEMISSION; SILICON NITRIDE; SPECTROSCOPIC ANALYSIS; SYNCHROTRON RADIATION;

LOW-ENERGY ELECTRON DIFFRACTION (LEED); PHOTOEMISSION SPECTROSCOPY (PES); SYNCHROTRON RADIATION PHOTOEMISSION SPECTROSCOPY;

SURFACE STRUCTURE;

EID: 33748307398     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2006.07.015     Document Type: Article

References (22)

1. Moon J., Ito T., and Hiraki A. Thin Solid Films 229 (1993) 93
2. Zerr A., Miehe G., Serghiou G., Schwarz M., Korke E., Reidel R., Fueß H., Kroll P., and Boehler R. Nature 400 (2000) 340
3. Han W., Fan S., Li Q., Gu B., Zhang X., and Yu D. Appl. Phys. Lett. 71 (1997) 2271
4. Schulz M. Nature 399 (1999) 729
5. Muller D.A., Sorsch T., Moccio S., Baumann F.H., Evans-Lutterodt K., and Timp G. Nature 399 (1999) 758
6. Peden C.H.F., Rogers Jr. J.W., Shinn N.D., Kidd K.B., and Tsang K.L. Phys. Rev. B 47 (1993) 15622
7. Rignanese G.-M., and Pasqurello A. Surf. Sci. 490 (2001) L614
8. Rignanese G.-M., and Pasqurello A. Appl. Phys. Lett. 76 (2000) 553
9. Kärcher R., Ley L., and Johnson L. Phys. Rev. B 30 (1984) 1896
10. Keister J.W., Rowe J.E., Kolodziej J.J., Niimi H., Madey T.E., and Lucovsky G. J. Vac. Sci. Technol. B 17 (1999) 1831
11. Chan H.-L., Kumar A., Sanderson L., and Weimer J.J. Mat. Res. Soc. Symp. Proc. 441 (1997) 487
12. Bachurin V.I., Churilov A.B., Potapov E.V., Smirnov V.K., Makarov V.V., and Danilin A.B. Nucl. Instr. Meth. B 147 (1999) 316
13. Kusunoki I., Takaoka T., Igari Y., and Ohtsuka K. J. Chem. Phys. 101 (1994) 8238
14. Rah S., Kang T., Chung Y., Kim B., and Lee K. Rev. Sci. Instrum. 66 (1995) 1751
15. Kim K.-j., Kang T.-H., and Kim B. J. Kor. Phys. Soc. 30 (1997) 148
16. Ko I.S., Huang J.Y., Seon D.K., Kim C.B., and Lee T.-Y. J. Kor. Phys. Soc. 35 (1999) 411
17. Kim K.-j., Kang T.-H., Kim K.-w., Shin H.-j., and Kim B. Appl. Surf. Sci. 161 (2000) 268
18. Hammers R.J., Avoris P., and Bozo F. Phys. Rev. Lett. 59 (1987) 2071
19. Bozso F., and Avouris P. Phys. Rev. Lett. 57 (1986) 1185
20. Hill E.K., Kubler L., Bischoff J.L., and Bolmont D. Phys. Rev. B 35 (1987) 5913
21. Baek D.H., Kang H., and Chung J.W. Phys. Rev. B 49 (1994) 2651
22. Zhao G.L., and Bachlechner M.E. Phys. Rev. B 58 (1998) 1887