Atomic force microscopy study of hard coating films prepared by pulsed laser deposition method

Materials Research Society Symposium - Proceedings

Volumn 441, Issue , 1997, Pages 487-493

  Chan, Hsieh Li ^a   Kumar, Ashok ^a   Sanderson, L ^a   Weimer, J J ^a  

^a UNIVERSITY OF SOUTH ALABAMA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CERAMIC MATERIALS; DEPOSITION; PRESSURE EFFECTS; PULSED LASER APPLICATIONS; SEMICONDUCTING SILICON; SILICON CARBIDE; SILICON NITRIDE; SUBSTRATES; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; THIN FILMS;

ALUMINUM NITRIDE; PULSED LASER DEPOSITION;

PROTECTIVE COATINGS;

EID: 0030684483     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)