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Surface Science

Volumn 490, Issue 1-2, 2001, Pages

Nitrogen 1s core-level shifts at the NH3 saturated Si(100)-2 × 1 surface: A first-principles study

(2) Rignanese, G M a Pasquarello, Alfredo b

a UNIVERSITÉ CATHOLIQUE DE LOUVAIN (Belgium)

b INSTITUT ROMAND DE RECHERCHE NUMÉRIQUE EN PHYSIQUE DES MATÉRIAUX IRRMA (Switzerland)

Author keywords

Ammonia; Density functional calculations; Silicon; Silicon nitride; X ray photoelectron spectroscopy

Indexed keywords

AMMONIA; DIMERS; PHOTOEMISSION; SILICON NITRIDE; ULSI CIRCUITS; X RAY PHOTOELECTRON SPECTROSCOPY;

INTERDIMER INTERACTIONS;

SURFACE STRUCTURE;

EID: 0035451183 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/S0039-6028(01)01343-7 Document Type: Article

Times cited : (21)

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