-
2
-
-
0002904104
-
-
W. D. Brown, S. S. Ang, M. Loboda, B. Sammakia, R. Singh, and H. S. Rathore, Editors, PV 98-3, The Electrochemical Society Proceedings Series, Pennington, NJ
-
P. A. Kohl, Q. Zhao, K. Patel, D. Schmidt S. A. Bidstrup-Allen, R. Shick, and S. Jayaraman, in Dielectric Material Integration for Microelectronics, W. D. Brown, S. S. Ang, M. Loboda, B. Sammakia, R. Singh, and H. S. Rathore, Editors, PV 98-3, p. 169, The Electrochemical Society Proceedings Series, Pennington, NJ (1998).
-
(1998)
Dielectric Material Integration for Microelectronics
, pp. 169
-
-
Kohl, P.A.1
Zhao, Q.2
Patel, K.3
Schmidt, D.4
Bidstrup-Allen, S.A.5
Shick, R.6
Jayaraman, S.7
-
3
-
-
0034275436
-
-
P. T. Liu, T. C. Chang, Y. L. Yang, Y. F. Cheng and S. M. Sze, IEEE Trans. Electron Devices, 47, 1733 (2000).
-
(2000)
IEEE Trans. Electron Devices
, vol.47
, pp. 1733
-
-
Liu, P.T.1
Chang, T.C.2
Yang, Y.L.3
Cheng, Y.F.4
Sze, S.M.5
-
4
-
-
0034321483
-
-
P. T. Liu, T. C. Chang, M. C. Huang, Y. L. Yang, Y. S. Mor, M. S. Tsai, H. Chung, J. Hou, and S. M. Sze, J. Electrochem. Soc., 147, 4313 (2000).
-
(2000)
J. Electrochem. Soc.
, vol.147
, pp. 4313
-
-
Liu, P.T.1
Chang, T.C.2
Huang, M.C.3
Yang, Y.L.4
Mor, Y.S.5
Tsai, M.S.6
Chung, H.7
Hou, J.8
Sze, S.M.9
-
5
-
-
0001891370
-
-
P.T. Liu, T. C. Chang, H. Su, Y. S. Mor, Y. L. Yang, H. Chung, J. Hou, and S. M. Sze, J. Electrochem. Soc., 148, F30 (2001).
-
(2001)
J. Electrochem. Soc.
, vol.148
-
-
Liu, P.T.1
Chang, T.C.2
Su, H.3
Mor, Y.S.4
Yang, Y.L.5
Chung, H.6
Hou, J.7
Sze, S.M.8
-
6
-
-
0036502773
-
-
P. T. Liu, T. C. Chang, Y. S. Mor, C. W. Chen, T. M. Tsai, C. J. Chu, F. M. Pan, and S. M. Sze, Electrochem. Solid-State Lett., 5, G11 (2002).
-
(2002)
Electrochem. Solid-State Lett.
, vol.5
-
-
Liu, P.T.1
Chang, T.C.2
Mor, Y.S.3
Chen, C.W.4
Tsai, T.M.5
Chu, C.J.6
Pan, F.M.7
Sze, S.M.8
-
7
-
-
0034498614
-
-
B. S. J. Martin, J. P. Godschalx, M. E. Mills, E. O. Shatter II, and P. H. Townsend, Adv. Mater., 12, 1769 (2000).
-
(2000)
Adv. Mater.
, vol.12
, pp. 1769
-
-
Martin, B.S.J.1
Godschalx, J.P.2
Mills, M.E.3
Shatter E.O. II4
Townsend, P.H.5
-
8
-
-
84962909346
-
-
IEEE, June 5-7
-
R. D. Goldblatt, B. Agarwala, M. B. Anand, E. P. Barth, G. A. Biery, Z. G. Chen, S. Cohen, J. B. Connolly, A. Cowley, T. Dalton, S. K. Das, C. R. Davis, A. Deutsch, C. DeWan, D. C. Edelstein, P. A. Emmi, C. G. Faltermerier, J. A. Fitzsimmons, J. Hedrick, J. E. Heidenreich, C. K. Hu, J. P. Hummel, P. Jones, E. Kaltalioglu, B. E. Kastenmeier, M. Krishnan, W. F. Landers, E. Liniger, J. Liu, N. E. Lustig, S. Malhotra, D. K. Manger, V. McGahay, R. Mih, H. A. Nye, S. Purushothaman, H. A. Rathore, S. C. Seo, T. M. Shaw, A. H. Simon, T. A. Spooner, M. Stetter, R. A. Wachnik, and J. G. Ryan, in Proceedings of the International Interconnect Technology Conference, IEEE, p. 261, June 5-7, 2000.
-
(2000)
Proceedings of the International Interconnect Technology Conference
, pp. 261
-
-
Goldblatt, R.D.1
Agarwala, B.2
Anand, M.B.3
Barth, E.P.4
Biery, G.A.5
Chen, Z.G.6
Cohen, S.7
Connolly, J.B.8
Cowley, A.9
Dalton, T.10
Das, S.K.11
Davis, C.R.12
Deutsch, A.13
Dewan, C.14
Edelstein, D.C.15
Emmi, P.A.16
Faltermerier, C.G.17
Fitzsimmons, J.A.18
Hedrick, J.19
Heidenreich, J.E.20
Hu, C.K.21
Hummel, J.P.22
Jones, P.23
Kaltalioglu, E.24
Kastenmeier, B.E.25
Krishnan, M.26
Landers, W.F.27
Liniger, E.28
Liu, J.29
Lustig, N.E.30
Malhotra, S.31
Manger, D.K.32
McGahay, V.33
Mih, R.34
Nye, H.A.35
Purushothaman, S.36
Rathore, H.A.37
Seo, S.C.38
Shaw, T.M.39
Simon, A.H.40
Spooner, T.A.41
Stetter, M.42
Wachnik, R.A.43
Ryan, J.G.44
more..
-
9
-
-
85001139408
-
-
IEEE, June 4-6
-
J.J. Waeterloos, H. Struyf, J. V. Aelst, D. W. Castillo, S. Lucero, R. Caluwaerts, C. Alaerts, G. Mammaert, W. Boullart, E. Sleeckx, M. Schaekers, Z. Tokel, I. Vervoort, J. Steenbergen, B. Sijmus, I. Vos, M. Meuris, F. Iacopi, R. A. Donaton, M. V. Hove, S. Vanhaelemeersch, and K. Maex, in Proceedings of the International Inerconnect Technology Conference, IEEE, p. 253, June 4-6, 2001.
-
(2001)
Proceedings of the International Inerconnect Technology Conference
, pp. 253
-
-
Waeterloos, J.J.1
Struyf, H.2
Aelst, J.V.3
Castillo, D.W.4
Lucero, S.5
Caluwaerts, R.6
Alaerts, C.7
Mammaert, G.8
Boullart, W.9
Sleeckx, E.10
Schaekers, M.11
Tokel, Z.12
Vervoort, I.13
Steenbergen, J.14
Sijmus, B.15
Vos, I.16
Meuris, M.17
Iacopi, F.18
Donaton, R.A.19
Hove, M.V.20
Vanhaelemeersch, S.21
Maex, K.22
more..
-
11
-
-
0033221292
-
-
A.L.S. Loke, J. T. Wetzel, P. H. Townsend, T. Tanabe, R. N. Vrtis, M. P. Zussman, D. Kumar, C. Ryu, and S. S. Wong, IEEE Trans. Electron Devices, 46, 2178 (1999).
-
(1999)
IEEE Trans. Electron Devices
, vol.46
, pp. 2178
-
-
Loke, A.L.S.1
Wetzel, J.T.2
Townsend, P.H.3
Tanabe, T.4
Vrtis, R.N.5
Zussman, M.P.6
Kumar, D.7
Ryu, C.8
Wong, S.S.9
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