Effect of moisture on the Time Dependent Dielectric Breakdown (TDDB) behavior in an ultra-low-k (ULK) dielectric

IEEE International Integrated Reliability Workshop Final Report

Volumn 2005, Issue , 2005, Pages 39-43

  Lloyd, J R ^a   Shaw, T M ^a   Liniger, E G ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC BREAKDOWN; LEAKAGE CURRENTS; MATHEMATICAL MODELS;

FIELD COEFFICIENT; TIME DEPENDENT DIELECTRIC BREAKDOWN (TDDB); ULTRA-LOW-K (ULK);

MOISTURE;

EID: 33847693939     PISSN: 19308841     EISSN: 23748036     Source Type: Conference Proceeding    
DOI: 10.1109/IRWS.2005.1609559     Document Type: Conference Paper

References (3)

1. th Ann. Rel. Phys. Symp., 348 (2000)
2. th ESREF, 1861 (2004)
3. J.R. Lloyd, E.G. Liniger and T.M. Shaw, to appear in J. Appl. Phys. (15 October 2005)