Ion-induced self-organized dot and ripple patterns on Si surfaces

Vacuum

Volumn 81, Issue 2, 2006, Pages 155-159

  Ziberi, Bashkim ^a   Frost, Frank ^a   Höche, Thomas ^a   Rauschenbach, Bernd ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

Ion sputtering; Pattern formation; Self organization

Indexed keywords

ARGON; NANOSTRUCTURED MATERIALS; SILICON; SPUTTERING; SURFACE TOPOGRAPHY;

ION SPUTTERING; PATTERN FORMATION; SELF-ORGANIZATION;

ION BEAMS;

EID: 33747840397     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.03.018     Document Type: Article

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