Synthesis of nanocrystalline carbon nitride films by glow discharge plasma beam deposition

Materials Science and Engineering: A

Volumn 432, Issue 1-2, 2006, Pages 142-148

  Hu, Wei ^a   Xu, Ning ^a   Sheng, Yi Qun ^a   Zhang, Ting Wei ^a   Sun, Jian ^a   Wu, Jia Da ^a   Ying, Zhi Feng ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

Carbon nitride films; Glow discharge; Plasma beam deposition

Indexed keywords

BEAM PLASMA INTERACTIONS; DEPOSITION; GLOW DISCHARGES; NANOSTRUCTURED MATERIALS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE FILMS; PLASMA BEAM DEPOSITION METHOD;

CARBON NITRIDE;

BEAM PLASMA INTERACTIONS; CARBON NITRIDE; DEPOSITION; GLOW DISCHARGES; NANOSTRUCTURED MATERIALS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 33747804952     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2006.06.080     Document Type: Article

References (26)

1. Liu A.Y., and Cohen M.L. Science 245 (1989) 841
2. Zhang M., Pan L., Miyazaki T., and Nakayama Y. Jpn. J. Appl. Phys. 36 (1997) 4897
3. Bhatacharyya S., Cardinaud C., and Turban G. J. Appl. Phys. 83 (1998) 4491
4. Bhatacharyya S., Hietschold M., and Richter F. Diamond Relat. Mater. 9 (2000) 544
5. Ito H., Miki H., Namiki K.C., Ito N., Saitoh H., Suzuki T., and Yatsui K. J. Vac. Sci. Technol. A 22 (2004) 487
6. Freier Jr. F.L. Jpn. J. Appl. Phys., Part 1 36 (1997) 4886
7. Muhl S., and Mendez J.M. Diamond Relat. Mater. 8 (1999) 1809
8. Seo H., Kima J.H., Chung K.H., Kim J.Y., Kim S.H., and Jeon H. J. Appl. Phys. 98 (2005) 043308
9. Xu N., Du Y.C., Ying Z.F., Ren Z.M., and Li F.M. Rev. Sci. Instrum. 68 (1997) 2994
10. Xu N., Du Y.C., Ying Z.F., and Li F.M. Appl. Phys. Lett. 69 (1996) 1364
11. Teter D.M., and Hemley R.J. Science 271 (1996) 53
12. Yu K.-M., et al. Phys. Rev. B: Condens. Matter 49 (1994) 5034
13. Dorset D.L., and McCourt M.P. Acta Crystallogr., Sec. A: Found. Crystallogr. 50 (1994) 344
14. Hoffman A., Gouzman I., and Brener R. Appl. Phys. Lett. 64 (1994) 845
15. Fujimoto F., and Ogata K. Jpn. J. Appl. Phys. 32 (1993) L420
16. Ronning C., Felderman H., Merk R., Hofsass H., Reinke P., and Thiele J.U. Phys. Rev. B 58 (1998) 2207
17. Sharma A.K., and Narayan J. Int. Mater. Rev. 42 (1997) 137
18. Le Normand F., Hommet J., Szouml T., Fuchs C., and Fogarassy E. Phys. Rev. B 64 (2001) 5416
19. Muhl S., and Mendez J.M. Diamond Relat. Mater. 8 (1999) 1809
20. Widany J., Weich F., Kohler T., Porezag D., and Frauenheim T. Diamond Relat. Mater. 5 (1996) 1031
21. Wixam M. J. Am. Ceram. Soc. 73 (1990) 1973
22. Yen T.Y., and Chou C.P. Appl. Phys. Lett. 67 (1995) 2801
23. Yen T.Y., and Chou C.P. Solid State Commun. 95 (1995) 281
24. Xu N., Li L., Lin H., Wu J., Wu A., and Sun J. Phys. Lett. A 320 (2004) 297-301
25. Rao A.M., Richter E., Bandow S., Chase B., Eklund P.C., Wiliams K.A., Fang S., Subbaswamy K.R., Menon M., Thess A., Smaley R.E., Dresselhaus G., and Dresselhaus M.S. Science 275 (1997) 187
26. Yudasaka M., Komatsu T., Ichihashi T., Achiba Y., and Iijima S. J. Phys. Chem. B 102 (1998) 4892