Ion beam assisted texturing of polycrystalline Y2O3 films deposited via electron-beam evaporation

Thin Solid Films

Volumn 510, Issue 1-2, 2006, Pages 143-147

  Park, Seh Jin ^a   Norton, David P ^a  

^a University of Florida   (United States)

Author keywords

Evaporation; Ion bombardment; Oxides

Indexed keywords

ANISOTROPY; ELECTRON BEAMS; EVAPORATION; INTERFACIAL ENERGY; ION BOMBARDMENT; OXIDES; POLYCRYSTALLINE MATERIALS; X RAY DIFFRACTION; YTTRIUM COMPOUNDS;

BOND STRENGTH; CRYSTALLINE SUBSTRATES; SURFACE ENERGY ANISOTROPY;

THIN FILMS;

EID: 33747615963     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.305     Document Type: Article

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