Texture development of CeO2 thin films deposited by ion beam assisted deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 1, 2003, Pages 62-65

  Wang, J ^a   Fromknecht, R ^a   Linker, G ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CERIUM COMPOUNDS; COMPUTER SIMULATION; CRYSTAL ORIENTATION; CRYSTALLIZATION; EVAPORATION; ION BEAM ASSISTED DEPOSITION; ION SOURCES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TEMPERATURE; TEXTURES; X RAY DIFFRACTION ANALYSIS;

AMORPHOUS QUARTZ GLASS SUBSTRATES; OUT-OF PLANE MOSAIC SPREADS; SELF ION BEAM ASSISTED DEPOSITION;

THIN FILMS;

EID: 0037276154     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1521963     Document Type: Article

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