Room-temperature preparation of biaxially textured indium tin oxide thin films with ion-beam-assisted deposition

Journal of Materials Research

Volumn 18, Issue 2, 2003, Pages 442-447

  Thiele, Karola ^a   Sievers, Sibylle ^a   Jooss, Christian ^a   Hoffmann, Jörg ^b   Freyhardt, Herbert C ^a,b  

^a Institut fur Materialphysik   (Germany)

^b Zentrum fuer Funktionswerkstoffe gGmbh   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; FILM GROWTH; HIGH TEMPERATURE SUPERCONDUCTORS; ION BEAM ASSISTED DEPOSITION; OPACITY; TEXTURES; THERMAL EFFECTS; THIN FILMS; YTTRIUM BARIUM COPPER OXIDES;

BUFFER LAYERS;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0038004797     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2003.0056     Document Type: Article

References (21)

1. I. Hamberg and C.G. Granqvist, J. Appl. Phys. 60, R123 (1986).
2. P.K. Song, Y. Shigesato, I. Yasui, C.W. Ow-Yang, and D.C. Paine, Jpn. J. Appl. Phys. 37, 1870 (1998).
3. S. Laux, N. Kaiser, A. Zöller, R. Götzelmann, H. Lauth, and H. Bernitzki, Thin Solid Films 335, 1 (1998).
4. J.S. Kim, J.W. Bae, H.J. Kim, N.E. Lee, G.Y. Yeom, and K.H. Oh, Thin solid films. 377-378, 103 (2000).
5. Y. Iijima, N. Tanabe, O. Kohno, and Y. Ikeno, Appl. Phys. Lett. 60, 769 (1992).
6. Y. Iijima, M. Hosaka, N. Tanabe, N. Sadakata, T. Saitoh, O. Kohno, and K. Takeda, J. Mater. Res. 13, 3106 (1998).
7. J. Dzick, J. Hoffmann, S. Sievers, L-O. Kautschor, and H.C. Freyhardt, Physica C 372-376, 723 (2002).
8. A. Usoskin, H.C. Freyhardt, A. Issaev, J. Dzick, J. Knoke, M.P. Oomen, H-W. Neumüller, IEEE Trans. Appl. Supercond. 13, (2003, in press)
9. B.J. Kellet, J.H. James, A. Gauzzi, B. Dwir, D. Pavuna, and F.K. Reinhart, Appl. Phys. Lett. 57, 1146 (1990).
10. L-O. Kautschor, Dissertation, Institut für Materialphysik, Universität Göttingen, Göttingen, Germany (2002)
11. J. Wiesmann, J. Hoffmann, A. Usoskin, F. Garcia-Moreno, K. Heinemann, and H.C. Freyhardt, Appl. Superconductivity, Inst. Phys. Conf. Ser. No. 148, 503 (1995).
12. Y. Iijima, K. Onabe, N. Futaki, N. Tanabe, N. Sadakata, O. Kohno, and Y. Ikeno, IEEE Trans. Appl. Supercond. 3, 1510 (1993).
13. Y. Iijima, K. Onabe, N. Futaki, N. Tanabe, N. Sadakata, O. Kohno, and Y. Ikeno, J. Appl. Phys. 74, 1905 (1993).
14. J. Wiesmann, Dissertation, Institut für Materialphysik, Universität Göttingen, Göttingen, Germany (1998)
15. K.G. Ressler, N. Sonnenberg, and M.J. Cima, J. Am. Ceram. Soc. 80, 2637 (1997).
16. C.P. Wang, K.B. Do, M.R. Beasley, T.H. Geballe, and R.H. Hammond, Appl. Phys. Lett. 71, 2955 (1997).
17. D. Kim, Y. Han, J. Cho, and S. Koh, Thin Solid Films 377-378, 81 (2000).
18. T.G. Holesinger, S.R. Foltyn, P.N. Arendt, H. Kung, Q.X. Jia, R.M. Dickerson, P.C. Dowden, R.F. DePaula, and J.Y. Coulter, J. Mater. Res. 15, 1110 (2000).
19. K. Thiele, S. Sievers, J. Dzick, L-O. Kautschor, Ch. Jooss, J. Hoffmann, and H.C. Freyhardt, in Materials for High-Temperature Superconductor Technologies, edited by M.P. Paranthaman, M.W. Rupich, K. Salama, J. Mannhart, and T. Hasegawa (Mater. Res. Soc. Symp. Proc. 689, Warrendale, PA, 2001), p. 259.
20. Ch. Jooss, J. Albrecht, H. Kuhn, S. Leonhardt, and H. Kronmüller, Rep. Prog. Phys. 65, 651 (2002).
21. Ch. Jooss, L-O. Kautschor, M.P. Delamare, B. Bringmann, K. Guth, V. Born, S. Sievers, H. Walter, J. Dzick, J. Hoffmann, H.C. Freyhardt, B. de Boer, B. Holzapfel, and F. Sandiumenge, in High-Temperature Superconductors - Crystal Chemistry, Processing and Properties, edited by U. Balachandran, H.C. Freyhardt, T. Izumi, and D.C. Larbalestier (Mater. Res. Soc. Symp. Proc. 659, Warrendale, PA, 2001), p. II7.1.