The Relation between Ion Damage Anisotropy and IBAD YSZ Biaxial Alignment

IEEE Transactions on Applied Superconductivity

Volumn 7, Issue 2 PART 2, 1997, Pages 1432-1435

  Ressler, Kevin G ^a   Sonnenberg, Neville ^a   Cima, Michael J ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CRYSTAL ORIENTATION; DEPOSITION; ETCHING; FILM PREPARATION; GRAIN BOUNDARIES; ION BEAMS;

ION BEAM ASSISTED DEPOSITION (IBAD); YTTRIA-STABILIZED ZIRCONIA (YSZ);

SUPERCONDUCTING FILMS;

EID: 0031163382     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.620840     Document Type: Article

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