Laser-enhanced diffusion of nitrogen and aluminum dopants in silicon carbide

Acta Materialia

Volumn 54, Issue 16, 2006, Pages 4273-4283

  Tian, Z ^a   Quick, N R ^b   Kar, A ^a  

^a University of Central Florida   (United States)

^b AppliCote Associates LLC   (United States)

Author keywords

Excimer laser; Laser doping; Laser enhanced diffusion; Nd:YAG laser; Silicon carbide

Indexed keywords

ALUMINUM; DIFFUSION; DOPING (ADDITIVES); EXCIMER LASERS; MATHEMATICAL MODELS; NITROGEN;

DIFFUSION COEFFICIENTS; LASER DOPING; LASER ENHANCED DIFFUSION; ND:YAG LASER;

SILICON CARBIDE;

EID: 33747591888     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2006.05.020     Document Type: Article

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