Mechanism of enhanced diffusion of aluminum in 6H-SiC in the process of high-temperature ion implantation

Materials Research Society Symposium - Proceedings

Volumn 504, Issue , 1999, Pages 141-146

  Usov, Igor O ^a   Suvorova, A A ^a   Sokolov, V V ^a   Kudryavtsev, Y A ^a   Suvorov, A V ^a  

^a IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COMPOSITION EFFECTS; DIFFUSION IN SOLIDS; GETTERS; HIGH TEMPERATURE PROPERTIES; SECONDARY ION MASS SPECTROMETRY; SILICON CARBIDE; THERMAL EFFECTS;

GETTERING RELATED PEAK;

ION IMPLANTATION;

EID: 0032632586     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)