메뉴 건너뛰기




Volumn 10, Issue 4, 2006, Pages 333-344

Thermal characterization of tungsten thin films by pulsed photothermal radiometry

Author keywords

Pulsed laser; Pulsed photothermal radiometry; Surface temperature; Thermal properties; Thin films; Tungsten

Indexed keywords

CALIBRATION; CHARACTERIZATION; HEAT TRANSFER; RADIOMETRY; THERMAL CONDUCTIVITY; THIN FILMS;

EID: 33747493950     PISSN: 15567265     EISSN: None     Source Type: Journal    
DOI: 10.1080/15567260601009189     Document Type: Article
Times cited : (25)

References (31)
  • 1
    • 0036935003 scopus 로고    scopus 로고
    • Development of Tungsten Coated First Wall and High Heat Flux Components for Application in ASDEX Upgrade, ASDEX Upgrade Team
    • H. Maier, J. Luthin, M. Balden, S. Lindig, J. Linke,V. Rohde, and H. Bolt, Development of Tungsten Coated First Wall and High Heat Flux Components for Application in ASDEX Upgrade, ASDEX Upgrade Team, Journal of Nuclear Materials, vol. 307-311, pp. 116-120, 2002.
    • (2002) Journal of Nuclear Materials , vol.307-311 , pp. 116-120
    • Maier, H.1    Luthin, J.2    Balden, M.3    Lindig, S.4    Linke, J.5    Rohde, V.6    Bolt, H.7
  • 2
    • 0032639713 scopus 로고    scopus 로고
    • Review of Recent Works in Development and Evaluation of High-Z Plasma Facing Materials
    • N. Yoshida, Review of Recent Works in Development and Evaluation of High-Z Plasma Facing Materials, Journal of Nuclear Materials, vol. 266-269, pp. 197-206, 1999.
    • (1999) Journal of Nuclear Materials , vol.266-269 , pp. 197-206
    • Yoshida, N.1
  • 3
    • 0032683882 scopus 로고    scopus 로고
    • Sputtered Tungsten Films on Polyimide, an Application for X-ray Masks
    • J. Ligot, S. Benayoun, J.J. Hantzpergue, J.C. Remy, Sputtered Tungsten Films on Polyimide, an Application for X-ray Masks, Solid-State Electronics, vol. 43, pp. 1075-1078, 1999.
    • (1999) Solid-State Electronics , vol.43 , pp. 1075-1078
    • Ligot, J.1    Benayoun, S.2    Hantzpergue, J.J.3    Remy, J.C.4
  • 5
    • 69749086712 scopus 로고    scopus 로고
    • Improvements of On-Membrane Method for Thin Film Thermal Conductivity and Emissivity Measurements
    • A. Jacquot, G. Chen, H. Scherrer, A. Dauscher, and B. Lenoir, Improvements of On-Membrane Method for Thin Film Thermal Conductivity and Emissivity Measurements, Sensors and Actuators, Part A, vol. 117, pp. 203-210, 2005.
    • (2005) Sensors and Actuators, Part A , vol.117 , pp. 203-210
    • Jacquot, A.1    Chen, G.2    Scherrer, H.3    Dauscher, A.4    Lenoir, B.5
  • 6
    • 0039299896 scopus 로고
    • New Attempt for Measuring Thermal Diffusivity of Thin Films by Means of a Laser Flash Method
    • H. Ohta, H. Shibata, and Y. Waseda, New Attempt for Measuring Thermal Diffusivity of Thin Films by Means of a Laser Flash Method, Review of Scientific Instruments, vol. 60, pp. 317-321, 1989.
    • (1989) Review of Scientific Instruments , vol.60 , pp. 317-321
    • Ohta, H.1    Shibata, H.2    Waseda, Y.3
  • 7
    • 19444387803 scopus 로고    scopus 로고
    • Thermal Properties of Plasma-Sprayed Tungsten Deposits
    • H.-K. Kang, Thermal Properties of Plasma-Sprayed Tungsten Deposits, Journal of Nuclear Materials, vol. 335, pp. 1-4, 2004.
    • (2004) Journal of Nuclear Materials , vol.335 , pp. 1-4
    • Kang, H.-K.1
  • 8
    • 0032157888 scopus 로고    scopus 로고
    • Thermal Interface Resistance and Subsurface Effusivity of Submicron Metallic Films on Dielectric Substrates: An Experimental Method for Simultaneous Determination
    • N. Hmina, and Y. Scudeller, Thermal Interface Resistance and Subsurface Effusivity of Submicron Metallic Films on Dielectric Substrates: An Experimental Method for Simultaneous Determination, International Journal of Heat and Mass Transfer, vol. 41, pp. 2781-2798, 1998.
    • (1998) International Journal of Heat and Mass Transfer , vol.41 , pp. 2781-2798
    • Hmina, N.1    Scudeller, Y.2
  • 9
    • 0001292732 scopus 로고
    • Transient Thermoreflectance from Thin Metal Films
    • C.A. Paddock, and G.L. Eeslay, Transient Thermoreflectance from Thin Metal Films, Journal of Applied Physics, vol. 60, pp. 285-290, 1986.
    • (1986) Journal of Applied Physics , vol.60 , pp. 285-290
    • Paddock, C.A.1    Eeslay, G.L.2
  • 10
    • 0035656747 scopus 로고    scopus 로고
    • Development of a Thermal Diffusivity Measurement System for Metal Thin Films Using a Picosecond Thermoreflectance Technique
    • N. Taketoshi, T. Baba, and O. Akira, Development of a Thermal Diffusivity Measurement System for Metal Thin Films Using a Picosecond Thermoreflectance Technique, Measurement Science & Technology, vol. 12, pp. 2064-2073, 2001.
    • (2001) Measurement Science & Technology , vol.12 , pp. 2064-2073
    • Taketoshi, N.1    Baba, T.2    Akira, O.3
  • 11
    • 34250199492 scopus 로고    scopus 로고
    • N. Taketoshi, and T. Baba, A New Picosecond Thermoreflectance Technique for Thermal Diffusivity Measurements of Nanoscale Metal Thin Films, Proc. of 10th International IEEE Workshop on THERMal INvestigations of ICs and systems (THERMINIC 2004), pp. 15-18, Sophia Antipolis, France, 29 Sep.-1 Oct. 2004.
    • N. Taketoshi, and T. Baba, A New Picosecond Thermoreflectance Technique for Thermal Diffusivity Measurements of Nanoscale Metal Thin Films, Proc. of 10th International IEEE Workshop on THERMal INvestigations of ICs and systems (THERMINIC 2004), pp. 15-18, Sophia Antipolis, France, 29 Sep.-1 Oct. 2004.
  • 12
    • 0031476436 scopus 로고    scopus 로고
    • Thin Film Thermal Conductivity and Thickness Measurement Using Picosecond Ultrasonics
    • J.L. Hostetler, A.N. Smith, and P.M. Norris, Thin Film Thermal Conductivity and Thickness Measurement Using Picosecond Ultrasonics, Microscale Thermophysical Engineering, vol. 1, pp. 237-244, 1997.
    • (1997) Microscale Thermophysical Engineering , vol.1 , pp. 237-244
    • Hostetler, J.L.1    Smith, A.N.2    Norris, P.M.3
  • 13
    • 0001357162 scopus 로고    scopus 로고
    • Photothermal Properties of Bulk and Layered Materials by the Picosecond Acoustics Technique
    • B. Bonello, B. Perrin, and C. Rossignol, Photothermal Properties of Bulk and Layered Materials by the Picosecond Acoustics Technique, Journal of Applied Physics, vol. 83, pp. 3081-3088, 1998.
    • (1998) Journal of Applied Physics , vol.83 , pp. 3081-3088
    • Bonello, B.1    Perrin, B.2    Rossignol, C.3
  • 14
    • 0037188077 scopus 로고    scopus 로고
    • Evaluation of Thermal Diffusivity for Thin Gold Films Using Femtosecond Laser Excitation Technique
    • Y. Takata, H. Haneda, T. Mitsuhashi, and Y. Wada, Evaluation of Thermal Diffusivity for Thin Gold Films Using Femtosecond Laser Excitation Technique, Applied Surface Science, vol. 189, pp. 227-233, 2002.
    • (2002) Applied Surface Science , vol.189 , pp. 227-233
    • Takata, Y.1    Haneda, H.2    Mitsuhashi, T.3    Wada, Y.4
  • 16
    • 0030127509 scopus 로고    scopus 로고
    • Theoretical Analysis of the Surface Thermal Wave Technique for Measuring the Thermal Diffusivity of Thin Slabs
    • B. Zhang, and R.E. Imhof, Theoretical Analysis of the Surface Thermal Wave Technique for Measuring the Thermal Diffusivity of Thin Slabs, Applied Physics A Materials Science Processing, vol. 62, pp. 323-334, 1996.
    • (1996) Applied Physics A Materials Science Processing , vol.62 , pp. 323-334
    • Zhang, B.1    Imhof, R.E.2
  • 17
    • 0001392192 scopus 로고    scopus 로고
    • Measurement of Thermal Diffusivities of Thin Metallic Films Using the AC Calorimetric Method
    • T. Yamane, Y. Mori, S. Katayama, and M. Todoki, Measurement of Thermal Diffusivities of Thin Metallic Films Using the AC Calorimetric Method, Journal of Applied Physics, vol. 82, pp. 1153-1156, 1997.
    • (1997) Journal of Applied Physics , vol.82 , pp. 1153-1156
    • Yamane, T.1    Mori, Y.2    Katayama, S.3    Todoki, M.4
  • 18
    • 0033131471 scopus 로고    scopus 로고
    • Thermal Diffusivity by Modified AC Calorimetry Using a Modulated Laser Beam Energy Source
    • R. Kato, A. Maesono, R.P. Tye, and I. Hatta, Thermal Diffusivity by Modified AC Calorimetry Using a Modulated Laser Beam Energy Source, International Journal of Thermophysics, vol. 20, pp. 977-986, 1999.
    • (1999) International Journal of Thermophysics , vol.20 , pp. 977-986
    • Kato, R.1    Maesono, A.2    Tye, R.P.3    Hatta, I.4
  • 19
    • 0031097335 scopus 로고    scopus 로고
    • Thermal Conductivity of Thin Metallic Films Measured by Photothermal Profile Analysis
    • G. Langer, J. Hartman, and M. Reichling, Thermal Conductivity of Thin Metallic Films Measured by Photothermal Profile Analysis, Review of Scientific Instruments, vol. 68, pp. 1510-1513, 1997.
    • (1997) Review of Scientific Instruments , vol.68 , pp. 1510-1513
    • Langer, G.1    Hartman, J.2    Reichling, M.3
  • 20
    • 36549099049 scopus 로고
    • Thermal Conductivity Measurement from 30 to 750 K: The 3ω Method
    • D.G. Cahill, Thermal Conductivity Measurement from 30 to 750 K: The 3ω Method, Review of Scientific Instruments, vol. 61, pp. 802-808, 1990.
    • (1990) Review of Scientific Instruments , vol.61 , pp. 802-808
    • Cahill, D.G.1
  • 21
    • 0028381398 scopus 로고
    • Photoacoustic Characterization of Thermal Transport Properties in Thin Films and Microstructures
    • M. Rohde, Photoacoustic Characterization of Thermal Transport Properties in Thin Films and Microstructures, Thin Solid Films, vol. 238, pp. 199-206, 1994.
    • (1994) Thin Solid Films , vol.238 , pp. 199-206
    • Rohde, M.1
  • 22
  • 23
    • 0032023341 scopus 로고    scopus 로고
    • Thin-Film Thermophysical Property Characterization by Scanning Laser Thermoelectric Microscope
    • T. Borca-Tasciuc and G. Chen, Thin-Film Thermophysical Property Characterization by Scanning Laser Thermoelectric Microscope, International Journal of Thermophysics, vol. 19, pp. 557-567, 1998.
    • (1998) International Journal of Thermophysics , vol.19 , pp. 557-567
    • Borca-Tasciuc, T.1    Chen, G.2
  • 25
    • 0024862265 scopus 로고
    • Thermal Diffusivity Measurements by Pulsed Methods
    • D.L. Balageas, Thermal Diffusivity Measurements by Pulsed Methods, High Temperatures-High Pressures, vol. 21, pp. 85-96, 1989.
    • (1989) High Temperatures-High Pressures , vol.21 , pp. 85-96
    • Balageas, D.L.1
  • 26
    • 5844338838 scopus 로고    scopus 로고
    • Thermal Effusivity Profile Characterization from Pulse Photothermal Data
    • J.C. Krapez, Thermal Effusivity Profile Characterization from Pulse Photothermal Data, Journal of Applied Physics, vol. 87, pp. 4514-4524, 2000.
    • (2000) Journal of Applied Physics , vol.87 , pp. 4514-4524
    • Krapez, J.C.1
  • 27
    • 19744372719 scopus 로고    scopus 로고
    • Thermal Properties Characterization of Conductive Thin Films and Surfaces by Pulsed Lasers
    • J. Martan, N. Semmar, C. Leborgne, E. Le Menn, and J. Mathias, Thermal Properties Characterization of Conductive Thin Films and Surfaces by Pulsed Lasers, Applied Surface Science, vol. 247, pp. 57-63, 2005.
    • (2005) Applied Surface Science , vol.247 , pp. 57-63
    • Martan, J.1    Semmar, N.2    Leborgne, C.3    Le Menn, E.4    Mathias, J.5
  • 31
    • 33644516940 scopus 로고    scopus 로고
    • Thermal Conductance of Metal-Metal Interfaces
    • art. 245426
    • B.C. Gundrum, D.G. Cahill, and R.S. Averback, Thermal Conductance of Metal-Metal Interfaces, Physical Review B, vol. 72, art. 245426, 2005.
    • (2005) Physical Review B , vol.72
    • Gundrum, B.C.1    Cahill, D.G.2    Averback, R.S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.