SCOPUS 정보 검색 플랫폼

Volumn 36, Issue 21, 2003, Pages 2709-2713

Deposition and structure of W-Cu multilayer coatings by magnetron sputtering

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COPPER; GRAIN SIZE AND SHAPE; IRON; MAGNETRON SPUTTERING; MULTILAYERS; PRESSURE; SUBSTRATES; SURFACE STRUCTURE; TUNGSTEN;

ARGON GAS PRESSURE; MULTILAYER METALLIC COATINGS; TARGET POWER;

COATINGS;

EID: 0242468197 PISSN: 00223727 EISSN: None Source Type: Journal
DOI: 10.1088/0022-3727/36/21/018 Document Type: Article

Times cited : (40)

References (16)

1
- 0030413469
- Paturaud C, Farges G, Sainte Catherine M C and Machet J 1996 Surf. Coat. Technol. 86-87 388
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 388
- Paturaud, C.¹ Farges, G.² Sainte, C.M.C.³ Machet, J.⁴

2
- 0032683882
- Ligot J, Benayoun S, Hantzpergue J J and Remy J C 1999 Solid-State Electron. 43 1075
- (1999) Solid-State Electron. , vol.43 , pp. 1075
- Ligot, J.¹ Benayoun, S.² Hantzpergue, J.J.³ Remy, J.C.⁴

3
- 0030175644
- Shiu A S, Tung S S, Gastorf R J, Hogstrom K R, Morrison W H and Peters L J 1996 Int. J. Radiat. Oncol. Biol. Phys. 35 599
- (1996) Int. J. Radiat. Oncol. Biol. Phys. , vol.35 , pp. 599
- Shiu, A.S.¹ Tung, S.S.² Gastorf, R.J.³ Hogstrom, K.R.⁴ Morrison, W.H.⁵ Peters, L.J.⁶

4
- 0032179777
- Smid I, Akiba M, Vieider G and Plochl L 1998 J. Nucl. Mater. 258-263 160
- (1998) J. Nucl. Mater. , vol.258-263 , pp. 160
- Smid, I.¹ Akiba, M.² Vieider, G.³ Plochl, L.⁴

5
- 0034262767
- Esteve J, Zambrano G, Rincon C, Martinez E, Galindo H and Prieto P 2000 Thin Solid Films 373 282
- (2000) Thin Solid Films , vol.373 , pp. 282
- Esteve, J.¹ Zambrano, G.² Rincon, C.³ Martinez, E.⁴ Galindo, H.⁵ Prieto, P.⁶

6
- 0033676307
- Cheng L, Yu Y, Zhang L and Gao R 2000 Carbon 38 2133
- (2000) Carbon , vol.38 , pp. 2133
- Cheng, L.¹ Yu, Y.² Zhang, L.³ Gao, R.⁴

7
- 0032629195
- Gachon Y, Ienny P, Forner A, Farges G, Sainte Catherine M C and Vannes A B 1999 Surf. Coat. Technol. 113 140
- (1999) Surf. Coat. Technol. , vol.113 , pp. 140
- Gachon, Y.¹ Ienny, P.² Forner, A.³ Farges, G.⁴ Sainte, C.M.C.⁵ Vannes, A.B.⁶

8
- 17344377214
- Saito S, Fukaya K, Ishiyama S and Sato K 2002 J. Nucl. Mater. 307-311 1542
- (2002) J. Nucl. Mater. , vol.307-311 , pp. 1542
- Saito, S.¹ Fukaya, K.² Ishiyama, S.³ Sato, K.⁴

9
- 0030264152
- Davis J W, Slattery K T, Driemeyer D E and Ulrickson M A 1996 J. Nucl. Mater. 233-237 604
- (1996) J. Nucl. Mater. , vol.233-237 , pp. 604
- Davis, J.W.¹ Slattery, K.T.² Driemeyer, D.E.³ Ulrickson, M.A.⁴

10
- 0033884604
- Bokuchava G D, Schreiber J, Shamsutdinov N and Stalder M 2000 Physica B 276-278 884
- (2000) Physica B , vol.276-278 , pp. 884
- Bokuchava, G.D.¹ Schreiber, J.² Shamsutdinov, N.³ Stalder, M.⁴

11
- 0001208379
- Ge C C and Li J T 2000 J. Nucl. Mater. 283-287 1116
- (2000) J. Nucl. Mater. , vol.283-287 , pp. 1116
- Ge, C.C.¹ Li, J.T.²

12
- 0035545974
- Kim Y D, Oh N L, Oh S T and Moon I H 2001 Mater. Lett. 51 420
- (2001) Mater. Lett. , vol.51 , pp. 420
- Kim, Y.D.¹ Oh, N.L.² Oh, S.T.³ Moon, I.H.⁴

13
- 0036862593
- Belyakov V, Mazul I and Strebkov Yu 2002 Fusion Eng. Des. 61-62 129
- (2002) Fusion Eng. Des. , vol.61-62 , pp. 129
- Belyakov, V.¹ Mazul, I.² Strebkov, Y.³

14
- 0030148825
- Hubler G K and Sprague J A 1996 Surf. Coat. Technol. 81 29
- (1996) Surf. Coat. Technol. , vol.81 , pp. 29
- Hubler, G.K.¹ Sprague, J.A.²

15
- 0001915026
- ed R A Gottscho and R J Pearton (Bangalore, India: Transworld Research Network)
- Brault P et al 2000 Recent Research Developments in Vacuum Science and Technology vol 2, ed R A Gottscho and R J Pearton (Bangalore, India: Transworld Research Network) pp 35-57
- (2000) Recent Research Developments in Vacuum Science and Technology , vol.2 , pp. 35-57
- Brault, P.¹

16
- 0036682313
- Brault P, Thomann A L, Andreazza-Vignolle C and Andreazza P 2002 Eur. Phys. J. Appl. Phys. 19 83
- (2002) Eur. Phys. J. Appl. Phys. , vol.19 , pp. 83
- Brault, P.¹ Thomann, A.L.² Andreazza-Vignolle, C.³ Andreazza, P.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.