Local epitaxial growth of aluminum nitride and molybdenum thin films in fiber texture using aluminum nitride interlayer

Applied Physics Letters

Volumn 89, Issue 7, 2006, Pages

  Kamohara, Toshihiro ^a   Akiyama, Morito ^a   Ueno, Naohiro ^a   Nonaka, Kazuhiro ^a   Kuwano, Noriyuki ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; CRYSTAL STRUCTURE; CRYSTAL SYMMETRY; CRYSTALLIZATION; ELECTRODES; EPITAXIAL GROWTH; INTERFACES (MATERIALS); MICROSTRUCTURE; MOLYBDENUM; NUCLEATION;

ALUMINUM NITRIDE INTERLAYER; EQUIAXED COLUMNAR STRUCTURES; FIBER TEXTURE; HETEROEPITAXIAL RELATIONSHIP;

THIN FILMS;

EID: 33747489654     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2337558     Document Type: Article

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