The diffusion of Pt in BST films on Pt/Ti/SiO2/Si substrate by sol-gel method

Journal of Sol-Gel Science and Technology

Volumn 39, Issue 3, 2006, Pages 293-298

  Hu, Wencheng ^a   Yang, Chuanren ^a   Zhang, Wanli ^a   Liu, Guijun ^a   Dong, Dong ^a  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Auger electron spectroscopy; Barium strontium titanate; Pt diffusion; Thin film; X ray photoelectron spectrum

Indexed keywords

DIFFUSION; FERROELECTRIC MATERIALS; PEROVSKITE; PLATINUM; SILICON; SOL-GELS; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

AUGER ELECTRON SPECTROSCOPY (AES); BARIUM STRONTIUM TITANATE (BST); PLATINUM DIFFUSION; X RAY PHOTOELECTRON SPECTRUM;

BARIUM COMPOUNDS;

EID: 33747371942     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10971-006-7809-9     Document Type: Article

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