Influence of buffer layer on dielectric properties of (Ba1-xSrx)TiO3 thin films

Microelectronic Engineering

Volumn 66, Issue 1-4, 2003, Pages 631-636

  Peng, Dongwen ^a   Meng, Zhongyan ^a  

^a SHANGHAI UNIVERSITY   (China)

Author keywords

BST; Buffer layer; Dielectric tunability; Sol gel

Indexed keywords

BARIUM COMPOUNDS; DIELECTRIC PROPERTIES; SCANNING ELECTRON MICROSCOPY; SOL-GELS; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

BUFFER LAYERS;

THIN FILMS;

EID: 0037391674     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00975-9     Document Type: Conference Paper

References (15)

1. De Flaviis F., Alexopoulos N.G., Stafsudd O.M. IEEE Trans. MWTT. 45:1997;963-969.
2. Chen Y.C., Huang C.L. Micro. Optic. Tech. Lett. 29:2001;359-362.
3. Tombak Ayguavives A., Francisco T., et al. IEEE MTTS. 1:2001;1453-1456.
4. Chang W., Horwitz J.S., Wonjeong K., et al. Integ. Ferro. 24:(1):1999;257-272.
5. Jiang H., Hu W., Liang S., et al. Mater. Res. Soc. Symp. 574:1999;311-316.
6. Y. Ding, Post-Doctoral Dissertation, Shanghai Jiaotong University, March 2002.
7. Baniecki J.D., Laibowitz R.B., Shaw T.M., et al. Appl. Phys. Lett. 72:1998;498-500.
8. Ding W., Meng Z. Proc. SPIE. 4086:2000;675-678.
9. Ding Y., Chengyu J., Meng Z. Thin Solid Films. 375:2000;196-199.
10. Wu W., Peng D., Meng Z. Mater. Sci. Semiconduct. Proc. 4:2001;673-678.
11. Chien A.T., Xu X., Kim J.H., et al. J. Mater. Res. 14:(8):1999;3330-3339.
12. Vendik O.G., Ter-marirosyan L.T. Ferro. 144:1993;3-11.
13. Tsu R., Liu H., Hsu W., et al. Mater. Res. Soc. Symp. Proc. 361:1995;275-279.
14. Terauchi H., Watanabe Y., Kasatanic H., et al. J. Phys. Soc. Jpn. 61:1992;2194-2198.
15. Zhou C., Newns D.M. J. Appl. Phys. 82:1997;3081-3083.