Advanced laser micromachining processes for MEMS and optical applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6261 I, Issue , 2006, Pages

  Holmes, Andrew S ^a   Pedder, James E A ^a   Boehlen, Karl L ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b Exitech Ltd   (United Kingdom)

Author keywords

Excimer laser; Half tone; Laser ablation; MEMS; Micromachining; Microstructures; SIS

Indexed keywords

EXCIMER LASERS; LASER ABLATION; MASKS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; POLYMERS;

EXCIMER LASER MICROMACHINING TECHNIQUES; HALF-TONE MASKS; PROJECTION OPTICS; SYNCHRONOUS IMAGE SCANNING (SIS);

MICROMACHINING;

EID: 33747353832     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.682929     Document Type: Conference Paper

References (13)

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