New developments and applications in the production of 3D micro-structures by laser micro-machining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3898, Issue , 1999, Pages 240-249

  Rizvi, Nadeem H ^a   Rumsby, Phil T ^a   Gower, Malcolm C ^a  

^a Exitech Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

LASER ABLATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

LASER MICROMACHINING; MICRO-OPTICAL-ELECTRO-MECHANICAL SYSTEMS (MOEMS);

EXCIMER LASERS;

EID: 0033335518     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)