Laser micro-machining of high density optical structures on large substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5339, Issue , 2004, Pages 118-126

  Boehlen, Karl L ^a   Stassen Boehlen, Ines B ^a  

^a Exitech Ltd   (United Kingdom)

Author keywords

3D structures; Large area machining; Laser processing; Micro optics

Indexed keywords

COMPUTER AIDED DESIGN; LASER ABLATION; LIQUID CRYSTAL DISPLAYS; MICROMACHINING; MICROOPTICS; MICROSTRUCTURE; SYNCHRONIZATION;

3D STRUCTURES; LASER AREA MACHINING; LASER PROCESSING; SURFACE QUALITY;

OPTICAL DEVICES;

EID: 5444236995     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.537827     Document Type: Conference Paper

References (8)

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