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Volumn 50, Issue 7-8, 2006, Pages 1269-1275
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Determination of the interface properties of Ni-silicided strained-Si/SiGe heterostructure Schottky diodes using capacitance-voltage technique
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Author keywords
Doping profile; Heterojunction; Ni Silicide; Schottky diode; Strained Si
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Indexed keywords
ANNEALING;
CAPACITANCE;
COMPUTER SIMULATION;
DOPING (ADDITIVES);
ELECTRIC POTENTIAL;
HETEROJUNCTIONS;
SEMICONDUCTING SILICON COMPOUNDS;
DOPING PROFILE;
NI-SILICIDE;
STRAINED-SI;
SCHOTTKY BARRIER DIODES;
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EID: 33747171125
PISSN: 00381101
EISSN: None
Source Type: Journal
DOI: 10.1016/j.sse.2006.06.001 Document Type: Article |
Times cited : (14)
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References (23)
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