Crystallinity effect of AIN thin films on the frequency response of an AIN/IDT/Si surface acoustic wave device

Journal of the Korean Physical Society

Volumn 49, Issue 1, 2006, Pages 199-202

  Kim, Soo Ho ^a   Ko, Jae Hwan ^a   Seung Hyun, J I ^a   Yoon, Young Soo ^a  

^a Konkuk University   (South Korea)

Author keywords

AIN thin film; Crystallinity; Grain boundary; IDT; SAW

Indexed keywords

EID: 33747075508     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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