Piezoelectric properties of aluminum nitride for thin film bulk acoustic wave resonator

Journal of the Korean Physical Society

Volumn 47, Issue SUPPL. 2, 2005, Pages

  Nam, Kuangwoo ^a   Park, Yunkwon ^a   Ha, Byeoungju ^a   Shim, Dongha ^a   Song, Insang ^a   Pak, Jaemoon ^b   Park, Gwangseo ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Sogang University   (South Korea)

Author keywords

AlN; Film bulk acoustic wave resonator; Piezoelectric

Indexed keywords

EID: 27444445993     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (9)

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