Effects of deposition parameters on AIN film growth using reactive DC magnetron sputtering

Journal of the Korean Physical Society

Volumn 38, Issue 1, 2001, Pages 19-24

  Kim, Jae Keun ^a   Jeong, Sang Hun ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035530216     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (19)

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