Low-temperature growth of aluminum nitride on sapphire substrates

Journal of Crystal Growth

Volumn 257, Issue 1-2, 2003, Pages 123-128

  Guo, Q X ^a   Yahata, K ^a   Tanaka, T ^a   Nishio, M ^a   Ogawa, H ^a  

^a SAGA UNIVERSITY   (Japan)

Author keywords

A1. Crystal structure; A1. X ray diffraction; B1. Nitride; B1. Sapphire; B2. Semiconducting aluminum compounds

Indexed keywords

ALUMINUM; ARGON; CRYSTAL GROWTH; CRYSTAL STRUCTURE; CRYSTALLIZATION; MAGNETRON SPUTTERING; NITROGEN; SAPPHIRE; SEMICONDUCTING FILMS; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

RADIO FREQUENCY (RF);

ALUMINUM NITRIDE;

EID: 0041930721     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(03)01565-3     Document Type: Article

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