Yttria-stabilized zirconia films of different composition as buffer layers for the deposition of epitaxial diamond/Ir layers on Si(001)

Diamond and Related Materials

Volumn 15, Issue 4-8, 2006, Pages 479-485

  Gsell, S ^a   Fischer, M ^a   Bauer, Th ^a   Schreck, M ^a   Stritzker, B ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

Diamond growth and characterization; Heteroepitaxy; Iridium; Nucleation; YSZ

Indexed keywords

DIAMONDS; EPITAXIAL GROWTH; IRIDIUM; LASER ABLATION; NUCLEATION; PULSED LASER DEPOSITION; SILICON; SINGLE CRYSTALS; THIN FILMS;

DIAMOND GROWTH AND CHARACTERIZATION; DIAMOND WAFERS; HETEROEPITAXY; YTTRIA-STABILIZED-ZIRCONIA (YSZ);

ZIRCONIA;

EID: 33747025043     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.10.041     Document Type: Article

References (28)

1. Gsell S., Bauer T., Goldfuβ J., Schreck M., and Stritzker B. Appl. Phys. Lett. 84 (2004) 4541
2. Bauer T., Gsell S., Schreck M., Goldfuβ J., Lettieri J., Schlom D.G., and Stritzker B. Diamond Relat. Mater. 14 (2005) 314
3. Kisi E.H., and Howard C.J. Key Eng. Mater. 153-154 (1998) 1
4. Yoshimura M. Am. Ceram. Soc. Bull. 67 (1988) 1950
5. Yashima M., Kakihana M., and Yoshimura M. Solid State Ionics 86-88 (1996) 1131
6. Heuer A.H., Chaim R., and Lanteri V. Advances in ceramics 24A: Science and Technology of Zirconia III (1988) 3
7. Yamamoto O. Electrochim. Acta 45 (2000) 2423
8. Badwal S.P.S. Solid State Ionics 52 (1992) 23
9. Wang S.J., Ong C.K., Xu S.Y., Chen P., Tjiu W.C., Huan A.C.H., Yoo W.J., Lim J.S., Feng W., and Choi W.K. Semicond. Sci. Technol. 16 (2001) L13
10. Qiao J.M., and Yang C.Y. Mater. Sci. Eng., R 14 (1995) 157
11. Lei C.H., Van Tendeloo G., Siegert M., Schubert J., and Buchal Ch. J. Crystal Growth 222 (2001) 558
12. 3).
13. Wang C.M., Azad S., Thevuthasan S., Shutthanandan V., McCready D.E., and Peden C.H.F. J. Mater. Res. 19 (2004) 1315
14. Teufer G. Acta Cryst. 15 (1962) 1187
15. Brandon J.R., and Taylor R. Surf. Coat. Technol. 46 (1991) 75
16. Miller R.A., Smialek J.L., and Garlick R.G. Advances in Ceramics 3: Science and Technology of Zirconia (1983) 241
17. Toraya H., Yoshimura M., and Somiya S. J. Am. Ceram. Soc. 67 (1984) C119
18. Toraya H., Yoshimura M., and Somiya S. J. Am. Ceram. Soc. 67 (1984) C183
19. Perry C.H., and Liu D.W. J. Am. Ceram. Soc. 68 (1985) C184
20. Feinberg A., and Perry C.H. J. Phys. Chem. Solids 42 (1981) 513
21. Theunissen G.S.A.M., Winnubst A.J.A., and Burggraaf A.J. J. Mater. Sci. Lett. 8 (1989) 55
22. Aguiar R., Trtik V., Sanchez F., Ferrater C., and Varela M. Thin Solid Films 304 (1997) 225
23. Hata T., Nakano S., Masuda Y., Sasaki K., Haneda Y., and Wasa K. Vacuum 51 (1998) 583
24. Horita S., Horii S., and Umemoto S. Jpn. J. Appl. Phys. 37 (1998) 5141
25. Fukumoto H., Imura T., and Osaka Y. Jpn. J. Appl. Phys. 27 (1988) L1404
26. Onuma Y., Kamimura K., Nakao M., Kunugi K., and Kubota M. Jpn. J. Appl. Phys. 27 (1988) 1351
27. Garcia G., Casado J., Llibre J., Cifre J., Figueras A., Gali S., and Bassas J. Chem. Vapor Depos. 3 (1997) 91
28. Hörmann F., Roll H., and Stritzker B. Diamond Relat. Mater. 9 (2000) 256