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Volumn 304, Issue 1-2, 1997, Pages 225-228
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Effects of wavelength, deposition rate and thickness on laser ablation deposited YSZ films on Si(100)
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Author keywords
Deposition process; Epitaxy; Laser ablation
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Indexed keywords
CRYSTAL ORIENTATION;
DEPOSITION;
EPITAXIAL GROWTH;
EXCIMER LASERS;
LASER ABLATION;
LASER BEAM EFFECTS;
PRESSURE EFFECTS;
SILICON;
SUBSTRATES;
TEXTURES;
THERMAL EFFECTS;
YTTRIUM COMPOUNDS;
LASER REPETITION RATE;
YTTRIA STABILIZED ZIRCONIA;
ZIRCONIA;
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EID: 0031188424
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(97)00201-0 Document Type: Article |
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Times cited : (31)
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References (7)
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