Fabrication of discrete carbon nanotube based nano-scaled force sensors

Proceedings of IEEE Sensors

Volumn 2, Issue , 2004, Pages 1056-1059

  Stampfer, C ^a   Jungen, A ^a   Hierold, C ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Carbon Nanotubes; Nanomechanics; Nanosystems; NEMS

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; ELECTRON BEAMS; SENSORS;

METALLIC ELECTRODES; NANO-SCALED FORCE SENSORS;

CARBON NANOTUBES;

EID: 27544451158     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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