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Journal of Applied Physics

Volumn 100, Issue 2, 2006, Pages

Nanopore sculpting with noble gas ions

(5) Cai, Qun a,c Ledden, Brad a Krueger, Eric a Golovchenko, Jene A b Li, Jiali a

a UNIVERSITY OF ARKANSAS (United States)

b HARVARD UNIVERSITY (United States)

c FUDAN UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

ADATOM DIFFUSION MODEL; NANOMETER SCALE; NANOPORE SCULPTING; TEMPERATURE SPUTTERING;

INTERFACIAL ENERGY; ION BEAMS; ION SOURCES; NANOSTRUCTURED MATERIALS; SILICON NITRIDE; SPUTTER DEPOSITION; THIN FILMS;

INERT GASES;

EID: 33746831526 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2216880 Document Type: Article

Times cited : (58)

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